Operations and Maintenance Manual Software Calibration
Version 1.2 - June 2004 12 - 33
Station Names
The station names for the Model 7AF are shown in the table below.
Note: The pre-aligner and spin station have separate coordinates for placing and
receiving wafers.
Station
Name
Function
send 2 turret A placing and retrieving wafers
send 1 turret B placing and retrieving wafers
pre-aligner C placing wafers
pre-aligner c retrieving wafers
left work chuck D placing and retrieving wafers
right work chuck E placing and retrieving wafers
spin station F placing wafers
spin station f retrieving wafers
receive 1 turret G placing and retrieving wafers
receive 2 turret H placing and retrieving wafers
ROBOT (AND PRE-ALIGNER) COMMANDS
The root commands and macros (preprogrammed groups of root commands) listed
below are the most frequently used of the robot and pre-aligner control commands.
For further details, refer to the Equipe Technical Manuals.
FLIP [VALUE]
Flips the end effector puck up or puck down, depending upon the [VALUE] specified.
The [VALUE] can be either 1 or 0. The command "FLIP 1" would rotate the end
effector puck up if it is not already in that position.
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