Strasbaugh nTellect (Model 7AF) Wafer Grinder
12 - 32 Version 1.2 - June 2004
ROBOT (AND PRE-ALIGNER) SETUP AND
CALIBRATION
Manufactured by Equipe Technologies, the 7AF's wafer handling robot is a three-axis
servo activated device controlled by its own PC compatible controller. For detailed
information on the robot's hardware, software, and programming, refer to the Equipe
Technologies Atmospheric Robot, ATM - 100; Vacuum Robot,
VAC - 100, Technical Manual, located in Appendix G, Manufacturer's
Documentation, of this (the Model 7AF Operation and Maintenance Manual) manual.
Note: The section below focuses on the robot; however, much of the information
contained herein is applicable to the pre-aligner as well. The Equipe
Technical Manual for the pre-aligner is also included in Appendix G of this
manual.
ROBOT COORDINATES
The position information for the robot is represented in the form of polar coordinates.
The polar coordinates are rotational (Theta or T), radial extension (Radius or R), and
height (Z-axis or Z). Therefore, a specific position would be represented in the form,
(T, R, Z). The user can identify a specific set of coordinates by assigning them a
station name. Valid names are A-Z and a-z. For example, station "B" can be assigned
the coordinates (100,500,500) and station "b" can be assigned coordinates
(2000,400,1500).
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