Strasbaugh nTellect (Model 7AF) Wafer Grinder
12 - 36 Version 1.2 - June 2004
SAV
CAUTION! Use the SAV command only after the robot wafer size has been
set at 150 mm
(6 inches) by issuing the "SWS 150" command.
To use SAV with the wafer size at any other setting will
corrupt all coordinates for all the stations.
The "RSA" command must also be issued before using the "SAV"
command.
Follow the three-step sequence shown below when using the SAV command:
1. RSA
2. SWS 150
3. SAV
Saves all robot coordinates, variables, and parameters to the control computer's
nonvolatile memory. This command must be used when coordinates, variables, or
parameters are updated or changed. If the "SAV" command is not used, the new data
will be lost if power is turned off to the controller.
SCAN [STATION]
Scans the desired [STATION]. The command "SCAN A" would cause the robot to
scan and locate the wafers placed in a cassette on station A.
SCSI [STATION],[VARIABLE #],[VALUE]
A set of variables associated with each station instructs the robot on handling the
scanning data and end effector orientation for that station. The command "SCSI
B,5,23" would set the current value of variable number 5 for station B at 23.
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