Strasbaugh nTellect 7AF - Page 454

Strasbaugh nTellect (Model 7AF) Wafer Grinder
12 - 38 Version 1.2 - June 2004
ROBOT / CASSETTE TURRET POSITION CALIBRATION
The robot/cassette turret position calibration procedure, below, provides an example
of using the root commands and macros to calibrate a robot position.
NOTICE! Always use a 150 mm (6-inch) test wafer when calibrating the
robot.
THETA
1. Using the "SVOF" command, turn off the motors for all three axes.