Strasbaugh nTellect (Model 7AF) Wafer Grinder
12 - 42 Version 1.2 - June 2004
SETTING AND SAVING THE NEW COORDINATES
22. Use the "SPC [STATION],[THETA],[RADIUS],[Z-AXIS]" command to set
the station's coordinates to the correct values.
23. Use the "RSA" command to reset the motor parameters to their default
settings.
24. Use the "SWS 150" command to set the wafer size at 150 mm.
25. Use the "SAV" command to save the current position data to the controller's
nonvolatile memory.