Strasbaugh nTellect 7AF - Page 462

Strasbaugh nTellect (Model 7AF) Wafer Grinder
13 - 2 Version 1.2 - June 2004
PNEUMATIC ADJUSTMENTS
Overview 3
Clean Dry Air 5
Incoming Clean Dry Air 6
Left/Right Grind Chamber Seals 7
Left/Right Chuck Conditioning Arms Up 8
Left/Right Chuck Conditioning Arms Engage 13
Left/Right Chuck Conditioning Arms Brush Rotation 13
Left/Right Chuck Conditioning Arms Downforce 14
Automatic Lubricator 14
Send 1 Cassette Turret Rotary Actuator 15
Send 2 Cassette Turret Rotary Actuator 18
Receive 1 Cassette Turret Rotary Actuator 19
Receive 2 Cassette Turret Rotary Actuator 20
Left/Right Measurement Probes 21
Spin Station Spindle Up/Down 22
Spin Station Lid Up/Down 25
Spin Station Brush Arm Park 28
Robot Flipper 29
Lower (Work Chuck) Air Bearing Spindles 32
Upper (Grind Wheel) Air Bearing Spindles 32
Turret Hydraulic Accumulator Reservoirs 33
Vacuum 34
Left/Right Grind Chamber Seal Vacuum 34
Left/Right Work Chuck Vacuum 34
Pre-aligner Vacuum 35
Rinse Spin Chuck Vacuum 35
Robot End Effector Vacuum 35
D.I. Water 36
Left Work Chuck Cutting Water 36
Right Work Chuck Cutting Water 40
Left/Right Work Chuck D.I. Water Backflush 41
Spin Station Wafer Clean 46
Blow Off 47
Left/Right Work Chuck Air Blow Off 47
Spin Station Wafer Blow Off 48
Robot End Effector Blow Off 48
Spindle Cooling Water for the Four Air Bearing Spindles 49
Coarse Spindle Cooling Water 49
Fine Spindle Cooling Water 51
Left (Work Chuck) Spindle Cooling Water 52
Right (Work Chuck) Spindle Cooling Water 53