Strasbaugh nTellect (Model 7AF) Wafer Grinder
13 - 48 Version 1.2 - June 2004
Procedure for Setting Pressure:
• Refer to Left/Right Work Chuck D.I. Water Backflush, above in the D.I.
Water section of this chapter, for the chuck blow off setting procedure.
SPIN STATION WAFER BLOW OFF
Solenoid
No.
Component Name
Location/
Drawing No.
Setting Goals
32
Spin Station
Regulator and
Gauge: Door 7 Panel
Drawing: 224039
Pressure: 15 PSI
Procedure:
• Turn the knob on the regulator until the pressure gauge reads 15 PSI.
ROBOT END EFFECTOR BLOW OFF
Solenoid
No.
Component Name
Location/
Drawing No.
Setting Goals
36
Robot End Effector
Regulator and
Gauge: Door 7 Panel
Drawing: 224039
Pressure: 15 PSI
Procedure:
• Turn the knob on the regulator until the pressure gauge reads 15 PSI.
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