Operations and Maintenance Manual Pneumatic Adjustments
Version 1.2 - June 2004 13- 47
BLOW OFF
LEFT/RIGHT WORK CHUCK AIR BLOW OFF
Notes:
• Chuck backflush and blow off must always be readjusted whenever you
change to a work chuck with a pore size different from the one previously
installed.
• Chuck D.I. water backflush and air blow off, which together prevent the wafer
from sticking to the chuck, are set together. The Left Work Chuck D.I. Water
Backflush and Air Blow Off procedure, above in the D.I. Water section of this
chapter, provides steps for making both adjustments together.
Solenoid
No.
Component Name
Location/
Drawing No.
Setting Goals
20
24
Left Work Chuck
Air Blow Off
Right Work Chuck
Air Blow Off
Regulators: Door 14
Panel
no gauge
Drawing: 224038
Pressure: Set to
produce gentle, even
bubbling over the
work chuck surface--
typically 15 PSI.
CAUTION: Too
high a pressure can
destroy the work
chuck and damage
the probe. Avoid
production of violent
bubbling or mist.
Note: Always
readjust the chuck
backflush and blow
off whenever you
change to a work
chuck with a pore
size different from
the one previously
installed.
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