Strasbaugh nTellect 7AF - Page 506

Strasbaugh nTellect (Model 7AF) Wafer Grinder
13 - 46 Version 1.2 - June 2004
SPIN STATION WAFER CLEAN
Solenoid
No. Component Name
Location/
Drawing No. Setting Goals
34 Spin Station
Flow Control: Inside
Door 10.
Drawing: 224039
Flow: Set to
effectively clean
wafer and permit
wafer to be spun dry.
Note: Inadequate
flow results in poor
cleaning; excessive
flow results in
wafers that are still
wet after spin
drying.
Procedure:
• Rotate the flow control, located inside Door 10, until the goal shown below is
met:
GOAL: Set to effectively clean wafer and permit wafer to be spun dry.