Operations and Maintenance Manual Troubleshooting
Version 1.2 - June 2004 14 - 15
AIR PRESSURE (PSI)
COARSE SPINDLE PSI
Cause: Air pressure < switch setting. Resolution: Increase air pressure.
FINE SPINDLE PSI
Cause: Air pressure < switch setting. Resolution: Increase air pressure.
LEFT CHUCK PSI
Cause: Air pressure < switch setting. Resolution: Increase air pressure.
RIGHT CHUCK PSI
Cause: Air pressure < switch setting. Resolution: Increase air pressure.
CASSETTES
CROSS SLOT/CASSETTE
Cause:
• Wafer in most recently scanned
cassette is cross slotted.
• Robot scanning parameters
incorrect.
• Warped wafers.
Resolution:
• Adjust wafers in cassette to eliminate cross slot.
• Check and adjust scanning parameters.
• Remove warped wafers from cassette(s).
NEW RECEIVE CASSETTE
Cause: No wafer cassette is present at
the receive turret for wafers currently
being processed in the machine.
Resolution: Insert a wafer cassette at a receive turret.
NEW SEND CASSETTE
Cause: The "Start" button has been
pressed, but no wafers are present for
processing.
Resolution: Insert a cassette with wafers at a send turret.
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