Strasbaugh nTellect (Model 7AF) Wafer Grinder
14 - 28 Version 1.2 - June 2004
SPIN STATION
SPIN CHUCK UP/DOWN
Cause: Spin station chuck has not moved
into the commanded position.
Resolution: Check spin station chuck
up/down position sensors.
SPIN LID UP/DOWN
Cause: Spin station lid has not moved
into the commanded position.
Resolution: Check spin station lid
up/down position sensors.
SPIN STATION HOME
Cause: The procedure to home the spin
chucks failed.
Resolution:
• Retry homing the chucks after all
other axes have been homed.
• "Quit" and reenter the homing
screen. Press "Home All".
THICKNESS
THICKNESS LIMIT
Cause:
• Wafers were not coarse ground.
• Input wafer is too thick.
• Incorrect probe reference.
Resolution:
• Check feed wafer thickness in recipe.
• Check input wafer thickness.
• Check probe reference.
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