Operations and Maintenance Manual Troubleshooting
Version 1.2 - June 2004 14 - 29
TURRETS
HAND CLOSE TURRETS
Cause: At initialization, an unknown
state was detected on the position sensors
for one or more turrets and the software
did not know whether to put the turret in
the open or closed position.
Resolution: Move all turrets to an open or
closed position (preferable closed) by hand
and check the turret input sensors.
Notes:
• While an operator should never
operate a turret by hand, this ONE
CASE is an exception.
• Do not force a turret! If the
software did not set the position, the
turret will turn easily.
VACUUM
ALIGNER VACUUM (PREALIGNER)
Cause:
• Vacuum low.
• Front side tape on wafer is not flat.
• Incorrect vacuum sensor adjustment.
Resolution:
• Ensure stable vacuum.
• Check wafer taping.
• Check vacuum sensor adjustment.
LEFT CHUCK VACUUM
Cause:
• Vacuum < minimum requirement.
Note: Occurs when a request for vacuum
is made and no vacuum is detected after
a timer delay. This can happen at any
time.
Resolution:
• Increase vacuum.
• Check "Lt chuck min vac. " hg."
variable in machine set up variables.
LEFT CHUCK VACABORT
Cause: Vacuum dropped below the level
set in the machine variables while the
chuck was in motion and a wafer was
present, causing the grind to abort.
Note: Occurs when vacuum is lost
during a grind cycle.
Resolution:
• Check the vacuum delivery system.
• Decrease the left chuck minimum
vacuum machine variable.
(Machine Variable: 90)
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