Operations and Maintenance Manual Software and Control Computer Maintenance
Version 1.2 - June 2004 15- 9
GRIND DATA FILES
Versions of the 7AF software dated December 12, 1994 and later store grind data
onto the hard disk. At the Grind Data menu screen, grind data may be transferred
from the hard disk to a floppy diskette.
The 7AF software stores coarse and fine grind data to separate files with each dataset
time and date stamped. The files store data for approximately 6000 wafers. If the files
grow too large, the software will erase the old data and begin a new data file.
FILE STRUCTURE
The 7AF logs the state of the grinding process at the end of each grinding step, storing
coarse grind data in a file named COARSDAT.TXT and fine data in a file named
FINEDAT.TXT. As both files are tab delimited ASCII files, they are easily read by
most popular spreadsheets and databases as “text” files.
Refer to the example below for an illustration of a grind data file.
Each data file begins with the filename, “GRIND DATA”, and the columnar headings
listed on the first three lines. Tabs delimit all columnar data. Below the headings row,
each wafer dataset has its own time and date header. Each of the five rows listed
below the time and date header contains data for a grind cycle state. This state
occurred at the end of the step in the “Step” column. The steps are:
Step 0: Initial probe reading before grinding begins.
Step 1: State of the grinding cycle at the end of the first grinding step.
Step 2: State at the end of the second grinding step.
Step 3: State of the grinding cycle as the dwell begins.
Step 4: State at the end of the dwell step.
Step 5: State of the grind cycle at the end of the unload step. (Note that the
probe has been raised in this version of the software and that it no
longer gives valid readings.)
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