Strasbaugh Calibration Variables
5
Note on conditioning the work chucks. The cycle normally works like this.
In Part One, called conditioning, the chuck is washed and brushed clean. In
Part Two, called rinse, the brush is removed but the water remains turned-on
to remove material still on the chuck. Finally, the vacuum is turned on to dry
the chuck. When the spinning stops, the probe is referenced on the chuck.
Number: 19 Value: 0.0 Label: Special Options 0=No
This is a five-digit number. If any digit is non-zero it will activate one of
these potentially dangerous options. In software version 5.04 they are
ignored unless the preceding variable, Condition Chuck Options, has a non-
zero digit in either the one’s place or the ten’s place. With software version
5.06 that restriction was removed.
10000 Allow grinding to very small thickness.
1000 Changes handling of DSP motion control. And ignores grind
wheel following errors when the wheel is supposed to be idle.
100 Weaken the recipe consistency check.
10 Allow low work chuck vacuum.
1 After 3 failures to align a wafer, pretend it is aligned.
Number: 20 Value: -500.0 Label: Coarse Z Home u
When the coarse wheel is homed, it will stop this many microns down from
the home pulse position. A negative number means “down” and the letter u
resembles the Greek letter mu which is the symbol for microns.
Number: 21 Value: -8800.0 Label: Left Coarse Z ref u
This is a default value for the distance from the coarse Z home position to
the left work chuck in microns. That distance is also called the reference.
The reference is used to calculate absolute wheel position when the bridge is
moved.
Until the coarse wheel is referenced over the left work chuck, the value in
this variable is used as the reference in microns. If the left chuck is never
referenced because the operator selects Right Chuck Only, this number
should be large enough to prevent the coarse wheel from crashing into the
left work chuck or any material on the chuck during 7AF operation.
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