Operation and Maintenance Manual Model 7AF Wafer Grinder
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Number: 16 Value: 0.0 Label: Auto Clean Chucks 0=No
During the grind cycle, the work chucks are conditioned after each wafer.
Starting with software version 5.06 there will be additional chuck
conditioning. If the 7AF is left at the Grind Cycle screen and is not
processing wafers, the chucks will be conditioned every fifteen minutes. Just
before each of these extra conditionings, there will be an alarm bell and a
message on the screen to warn that conditioning is about to begin and that
parts, including the bridge, are about to move. The GEM Host can look for
Process State 22 to see whether this is happening. A request to start
grinding will be rejected until conditioning ends (after about one minute if
both chucks are being used). This feature can be turned on or off using this
variable.
Number: 17 Value: 0.0 Label: Work Chuck Machine Maint
Before version 6.05.0 this was called Work Chuck TopFlush 0=No. Some
7AF’s have a topflush option that operates together with the work chuck
backflush to clean the surface of the chuck. This does a better job of
cleaning, but has one problem during Machine Maintenance. While the
backflush can be run at any time, the topflush must only be run when the
bridge is not covering the chuck. Otherwise water will reflect off the bridge
and spray the robot. To inform software of the presence of the topflush, set
the ones digit of machine variable 17 to a non-zero value. A non-zero value
will prevent an operator from turning on the backflush (and the topflush)
when the bridge is in the way.
Version 6.05.0 changed the variable name and made use of the tens digit as a
timer ranging from 0-9 seconds. This is used as a delay between requests for
the work chuck conditioning arms during Machine Maintenance. The
problem is that bad choices such as Park followed by Down cannot be
detected if the operator presses buttons very rapidly. The timer prevents a
second button from being pressed too soon after the first. To turn off the
timer and experience no delay, just leave the tens digit as zero.
Number: 18 Value: 0.0 Label: Condition Chuck Options 0=No
This is a four-digit number. If any digit is non-zero, it will change the
behavior of the Condition Chuck Cycle, as follows. Add the following
values to get combinations of these options.
1000 Reference the probe at the start of the cycle, not the end.
100 Do not use vacuum to dry the chuck. Leave it wet.
10 Left Chuck: Do not use blowoff; Use the second part of the
cycle to dry the chuck by turning off backflush and turning on
vacuum.
1 Right Chuck: Same as the previous option.
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