Strasbaugh Calibration Variables
7
Number: 27 Value: 0.0 Label: 27 reserved
unused
Number: 28 Value: 0.0 Label: Coarse Approach Params
As the grind wheel descends towards the wafer at the start of a grind cycle, it
descends rapidly until reaching an intermediate height. Then it switches to an
intermediate speed of descent. When it touches the wafer, the speed changes
to the recipe speed. The intermediate height and intermediate speed were
fixed until software version 6.05. Now they can be adjusted using variable
28 for the coarse wheel and 29 for the fine wheel. However, adjusting them
requires considerable care. Warning: Grind results can be adversely
affected by poorly chosen values.
The form of these variables is the decimal value nnn.nn where the whole
number part gives the intermediate height in microns and the fractional part
gives the intermediate speed in microns per second. Note that three digits
can be used for the height and two digits for the speed. The value 50.40
represents height 50 and speed 40, which are the default values for coarse
grind. Zero or invalid height is treated as 50. Zero or invalid speed is
treated as 40.
Number: 29 Value: 0.0 Label: Fine Approach Parameters
See variable 28. The default for fine grind is 10.20. Zero or invalid height is
treated as 10. Zero or invalid speed is treated as 20.
Number: 30 Value: -1590.0 Label: Fine Z home u
When the fine wheel is homed, it will stop this many microns down from the
home pulse position. A negative number means “down” and the letter u
resembles the Greek letter mu which is the symbol for microns.
Number: 31 Value: -6500.0 Label: Left Fine Z ref u
This is similar to variable 21, but for the fine wheel.
Number: 32 Value: -4800.0 Label: Right Fine Z ref u
Similar to variable 21, but for the fine wheel and right work chuck.
Number: 33 Value: -6200.0 Label: Left Fine Z hover u
This value is not used in the software, and this variable may be assigned a
new meaning in the future.
Number: 34 Value: -4200.0 Label: Right Fine Z hover u
This value is not used in the software, and this variable may be assigned a
new meaning in the future.
Number: 35 Value: 2000.0 Label: Fine Wear Lim microns
When this much material has been worn away from the fine wheel, a warning
is issued.
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