Strasbaugh Calibration Variables
15
Number: 84 Value: 0.0 Label: Ind Wafer Grind Type
Before software version 5.00, this was labeled Delta Grind 0=No and was
used to distinguish Delta Grind from the other kinds of grinding. With
version 5.00 that choice was moved into the grind recipe.
In version 6.04.0 this variable received a new use. Ind Wafer grind mode,
introduced in version 5.02 requires the user to supply a data file with
thickness information. The file reports the thickness of the top layer of a
three-layer “sandwich.” It is sometimes more accurate to measure the total
thickness of the bottom two layers instead. Use this machine variable to
make the choice. If the variable is 0, the data file contains thickness for the
top layer. It the variable is 1, the data file contains the total thickness of the
bottom two layers.
Number: 85 Value: 212.0 Label: Robot Controller Model#
Set this to 212 for Equipe series 212 robot and prealigner. Any other value
will indicate Equipe series 100 robot and prealigner. Software needs to
know the model number because some different commands must be issued to
the different models. (Note: In some earlier software versions, it was
necessary to explicitly use 100 for the series 100 robot. A choice other than
100 or 212, such as zero, would not always give consistent results in those
earlier versions.)
Number: 86 Value: 0.0 Label: In-Situ Dress Freq
If this is non-zero, perform an in-situ dress of the coarse wheel on the left
chuck whenever this many wafers have been ground. Do not use the left
chuck for grinding a wafer.
If this is zero, no in-situ dress is taking place in the current grind cycle.
Number: 87 Value: 30000.0 Label: Lube Timer minutes
This tells how often to operate the bridge lubricator (Opto-22 output 13).
Number: 88 Value: 1.0 Label: Left Chuck D.I. Coolant gpm
Minimum allowed left chuck coolant flow, in gallons per minute.
Number: 89 Value: 1.0 Label: Right Chuck D.I. Coolant gpm
Minimum allowed right chuck coolant flow, in gallons per minute.
Number: 90 Value: 2.0 Label: LT Chuck Min Vac “hg
Minimum allowed left chuck vacuum, in inches of mercury. (The chemical
symbol for mercury is Hg.)
To Next Page
Loading...
