Strasbaugh nTellect 7AF - Page 579

Strasbaugh Calibration Variables
19
Station Item Meaning
c = Prealigner (GET) 0 angle between robot & prealigner;
need for align square wafers
c = Prealigner (GET) 1 change the offset for GET/PUT of
4-inch wafers
C = Prealigner (PUT) 2 pause before vacuum on in GET at all
stations
C = Prealigner (PUT) 3 pause before vacuum off in PUT at all
stations
c = Prealigner (GET) 4 angle to rotate aligned wafer before
testing for minor flat
D = Left Work Chuck 0 pause before robot lifts wafer in GET;
allow blowoff to begin
E = Right Work Chuck 0 pause before robot lifts wafer in GET;
allow blowoff to begin
f = Spin Station (GET) 0 pause before robot lifts wafer in GET;
allow blowoff to begin
g (not station, just data) store alternative “slow” speed & accel
0 bit flags for GET
1 bit flags for PUT
2 slow speed theta
3 slow speed radial
4 slow speed Z
5 slow accel theta
6 slow accel radial
7 slow accel Z
j = Spin Station (GET) 1 extra robot motion before GET j with
two-sided grind
L (not station, just data) 0 odd-size wafer bit-flags; 0 at startup
1 extra R offset for scan 2” wafers
three extra R offset for scan 3” wafers
five extra R offset for scan 4” wafers