Operation and Maintenance Manual Model 7AF Wafer Grinder
20
l (small L, not station) 0 special align options
0 normal align
1 if align fails rotate back to start
2 try one align; if fails, pretend ok
3 both options 1 and 2 above
1 TLIGN pin speed; 0=default speed
2 TLIGN pin height
3 TLIGN pin position for 2” wafer
4 TLIGN pin position for release
6 TLIGN pin height after release
A,B,G,H = cassettes 0-3 used in scanning
Any station 9 1 in this item identifies the pre-aligner
Any station 10 0=Flip; 1=NoFlip
Any station 11 extra move up/dn after PUT
The value of the PITCH has also been borrowed by the 7AF software.
Usually, pitch and wafers per cassette are set in the Machine Maintenance
screens, overriding whatever is set in the robot coordinate file. However, if
the Machine Maintenance screen has (-1) for both of these, certain values in
the robot coordinates are used. For the send cassettes, pitch is set by PITCH
A, while wafers per cassette is set by PITCH C. For the receive cassettes,
pitch is set by PITCH G, while wafers per cassette is set by PITCH F. No
other PITCH values are used. The others should be set so B will match A, H
will match G, c will match C, and f will match F. The purpose of this is to
allow two new capabilities. First, pitch and wafers per cassette can be set
differently in different recipes. Second, send and receive cassettes can be
different sizes.
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