Machine Variables 08/16/04 9:26 AM
No. Value Label No. Value Label
STRASBAUGH CONFIDENTIAL INFORMATION
0 0.0000 0 reserved
1 28800.0000 Bridge counts/inch
2 320.0000 LT Wheel Z counts/micron
3 320.0000 RT Wheel Z counts/micron
4 2000.0000 LT Wheel counts/rev
5 2000.0000 RT Wheel counts/rev
6 2000.0000 LT Chuck counts/rev
7 2000.0000 RT Chuck counts/rev
8 4000.0000 Spin Station counts/rev
9 1.0000 Work Chuck Dir (+/-1.0)
10 0.0000 LT Chuck Home Offset
11 0.0000 RT Chuck Home Offset
12 0.5000 Bridge Home in
13 15.0000 Bridge Center in
14 30.0000 Bridge Left in
15 0.0000 Request Re-Reference
16 0.0000 Auto Clean Chucks 0=No
17 1.0000 Work Chuck Machine Maint
18 0.0000 Condition Chuck Options 0=No
19 0.0000 Special Options 0=No
20 -500.0000 Coarse Z home u
21 -8800.0000 Left Coarse Z ref u
22 -8000.0000 Right Coarse Z ref u
23 -7700.0000 Left Coarse Z hover u
24 -3728.0000 Right Coarse Z hover u
25 2000.0000 Coarse Wear Lim microns
26 0.0000 Coarse Max Whl/Wafer
27 0.0000 27 reserved
28 0.0000 Coarse Approach Params
29 0.0000 Fine Approach Parameters
30 -1590.0000 Fine Z home u
31 -6500.0000 Left Fine Z ref u
32 -4800.0000 Right Fine Z ref u
33 -6200.0000 Left Fine Z hover u
34 -4200.0000 Right Fine Z hover u
35 2000.0000 Fine Wear Lim microns
36 0.0000 Fine Max Whl/Wafer
37 0.0000 Probe Bounce Threshold
38 0.0000 Robot & Aligner Timeout
39 0.0000 Altitude Vacuum Adjust
40 250.0000 LT Chuck accel rpm/sec
41 250.0000 RT Chuck accel rpm/sec
42 0.0000 LT Chuck Wafer Dry secs
43 0.0000 LT Chuck Wafer Rinse secs
44 0.0000 RT Chuck Wafer Dry secs
45 0.0000 Spin Station Options
46 0.0000 RT Chuck Wafer Rinse secs
47 0.0000 Grind Seal Sensors 0=No
48 0.0000 Dual Coarse or Fine Grnd
49 0.0000 RPM for Following Error
50 1000.0000 Reference wafer
51 305.6000 Coarse Deadweight lbs
52 306.2000 Fine Deadweight lbs
53 0.0000 Password Needed 0=No
54 4.0000 CZ Dwell LBS
55 6.0000 FZ Dwell LBS
56 10.0000 FZ Grind Force Hystr LBS
57 50.0000 FZ Max Grind Force LBS
58 10.0000 CZ Grind Force Hystr LBS
59 60.0000 CZ Max Grind Force LBS
60 1.0000 Coarse Max Deceleration
61 0.2000 Fine Max Deceleration
62 250.0000 LT Chuck Condition rpm
63 8.0000 LT Chuck Condition secs
64 250.0000 LT Chuck Rinse rpm
65 5.0000 LT Chuck Rinse secs
66 0.0000 LT Offset +/-10micron
67 0.0000 Exhaust,Drain,PSI Monitr
68 250.0000 RT Chuck Condition rpm
69 8.0000 RT Chuck Condition secs
70 250.0000 RT Chuck Rinse rpm
71 5.0000 RT Chuck Rinse secs
72 0.0000 RT Offset +/-10micron
73 10.0000 Polish Removal Limit
74 0.0000 Fine Force Timeout
75 0.0000 Coarse Force Timeout
76 1000.0000 SPIN Clean rpm
77 5.0000 SPIN Clean secs
78 2000.0000 SPIN Dry rpm
79 10.0000 SPIN Dry secs
80 0.0000 Cassette pitch inches
81 0.0000 Wafers per Cassette
82 0.0000 Cassette Flags
83 0.0000 83 no longer used
84 0.0000 Ind Wafer Grind Type
85 212.0000 Robot Controller Model#
86 0.0000 In-Situ Dress Freq
87 30000.0000 Lube timer minutes
88 1.0000 Left Chuck D.I. Coolant gpm
89 1.0000 Right Chuck D.I. Coolant gpm
90 2.0000 LT Chuck Min Vac "hg
91 2.0000 RT Chuck Min Vac "hg
92 8.0000 SPIN Min Vac "hg
93 10.0000 Robot Min Vac "hg
94 10.0000 Prealigner Min Vac "hg
95 0.0000 Dress Probe Avg Revs
96 0.0000 Grind Probe Avg Revs
97 0.0000 Probe Options 0=No
98 0.0000 Vacuum Delays 0=No
99 3131.0000 Chuck D.I. Coolant Timers
To Next Page
Loading...
