Strasbaugh nTellect (Model 7AF)Wafer Grinder
2 - 20 Version 1.2 - June 2004
STEP 4 - UTILITY REQUIREMENTS
IMPORTANT: The necessary utilities must meet the required specifications
(shown below) in order to operate the Model 7AF Wafer Grinder correctly. The
following list identifies the minimum facilities requirements for the machine:
• Electrical: 230 VAC/208 VAC, THREE-
PHASE, 60 Hz, 45 FULL LOAD AMPS (50 Hz available)
• Clean Dry Air: 25 SCFM at 100 PSI minimum
• D.I. Water In: 6 GPM at 30 PSI minimum,
60 PSI maximum
• Exhaust: 250 CFM at 1/2-inch of water
static pressure, one 5-inch duct
• Grinding Coolant: D.I. water; 6 GPM at 30 PSI
minimum, 50 PSI maximum
• Spindle Coolant: municipal or chilled water;
1 GPM at 30 PSI minimum,
60 PSI maximum
(not a separate line, from main
D.I. Water In)
• Industrial Waste: 2-inch pipe, 6 GPM gravity feed
• Vacuum: 4 CFM at 22-25 inches Hg
• Vacuum System (optional) stand alone vacuum
[included with Strasbaugh pumping plant assembly and
vacuum system] lines, equipped with auto drain
Note: The vacuum connection to the machine will collect some process water and
silicon particles through the vacuum line to the vacuum source. An isolated
vacuum pump with a self-contained drain system is available from Strasbaugh as a
machine option. For use with a facility vacuum supply, a wall mountable
vacuum/waste separator is also available. Consult the factory for details.
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