Machine Setup Changes
When the Left/Right/Both “Chuck Used” indicator is changed, the servos must all be homed and referenced.
When any variables are changed, the amplifiers are turned off and a notification is given to the operator. This
is to avoid “creep” if there are offsets in the servo system that could cause the Z axes to jam against the hard
stops. The left and right chuck vacuum set points can be a negative value (pressure), but due to internal
limits, the affect of this setting is minimal. Machine Variable #82, ATC Grinder, is now used to set
characteristics for grinding alternative materials, such as ATC.
Software Interlock Backup
The software now supports hardware modifications to shut down power should the software fail to “see” an
interlock (gull doors and upper access panels) and take appropriate action. The hardware is only “armed”
after the software is running and has enabled servos. Therefore when software is not running, the servos are
disabled and the access points can be used without the possibility of needlessly shutting down power. For
more information, request ECR #96-1078.
Alternative Materials (ATC) Grinder Option
Machine Variable #82 is used to designate the grinder as an ATC Grinder. The default value of 0.0 will allow
the machine to operate as a conventional silicon grinder.
Utility Software
There are three support batch files, as well as the PASS7AF.EXE password maintenance program. Recipe
security utilities, LOCK.BAT and UNLOCK.BAT were used at some installations as a precursor to
password security. The batch files, LOCK and UNLOCK should only be used if files will not be maintained
remotely, i.e. through GEM. If these utilities have been used and files will be remotely maintained, be sure to
UNLOCK the recipes first. The batch files are described in a separate document, 7AF Backup, Recovery
and Temporary Security Measures. Also described in this document is a utility batch file, 7AFBAK.BAT,
that backs up critical files to a floppy disk.
7AF Version 3.01 Features
12/18/96 Ken Hill
Purpose
Software version 3.01 for the model 7AF contains revisions to allow the grinding of alternative materials,
such as ATC. This version is derived from a v3.00 test version on 12/15/96. Any changes will be
incorporated into later upgrades or when the GEM computer is installed. There are also changes in the
FloPro flow charts to support these new features. If upgraded from a version before v3.00, new FloPro
runtime software, version 2.776, will be automatically installed. Likewise, new screen files (.GRS) may be
used and are automatically installed. This software must use Robot Macros, version 2.04!
Setting up for ATC Grinding
To grind ATC, the fine grind step is modified to reach the fine force grind limit (Machine Variable #57),
then reduce grind force to fine dwell force (Machine Variable #55). These changes are set by changing
“ATC Grinder” (Machine Variable #82) to a non-zero number. The grinder is changed back to a standard
silicon grinder by changing “ATC Grinder” (Machine Variable #82) to zero. Other changes to grind ATC
will probably be required. These are documented in “Setting Custom Wafer and Cassette Dimensions.”
Be sure to review these requirements before starting the machine.
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