Strasbaugh nTellect (Model 7AF)Wafer Grinder
2 - 22 Version 1.2 - June 2004
Figure 2-3 Utility Connections
UTILITY REQUIREMENT CONNECTION
[A] INDUSTRIAL WASTE DRAIN gravity feed 2-inch pipe
[B] EXHAUST 250 CFM at 1/2-in. static pressure 5-inch diameter
[C] DI WATER IN 6 GPM at 30 PSI min. 1/2-inch tube
[D] DI WATER OUT 6 GPM at 30 PSI min. 1/2-inch tube
[E1] LEFT WORK CHUCK VACUUM 4 CFM at 25 inches Hg 1/2-inch tube
[E1] RIGHT WORK CHUCK VACUUM 4 CFM at 25 inches Hg 1/2-inch tube
[E3] ROBOT VACUUM 1 CFM at 25 inches Hg 1/2-inch tube
[F] SPINDLE COOLANT IN 1 GPM at 30 PSI min. 3/8-inch tube
[G] SPINDLE COOLANT OUT (at least 15 PSI less than Spindle Coolant In) 3/8-inch tube
[I] ELECTRICAL 230V/208V, 3 pH, 60 Hz, 45 FLA
[J] VACUUM CLEAN DRY AIR clean dry air supply for RHS vacuum system 1/4-inch tube
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