Other Features
There is now a message instructing the operator to remove the dressing pad after dressing a wheel.
Alarms have been added to latch conditions and help in diagnosing “Grind Abort” faults. Specifically, the
“Right and Left Vacuum Abort” and “Service Panel Abort” are now implemented.
Robot Macros
There are two new macro sets for the ESC212 controller. The upgrade to the RP212.MAC macro set adds
more ability to reach wafers below the end effector on the chucks. It can now move more than 0.1” in
searching for the wafer. The SQ212.MAC macro set has been generated to align square wafers. The
Firmware must be version 4.46IMI in order for these macros to work. The ability to align round wafers has
been preserved for manual operation from the EQT software. The round align macro name is “RALIGN”
and is only available manually. The correct macro set must be chosen for the material being ground. Only one
type, round or square, is supported.
7AF Version 4.04 Features
8/11/98 Steve Jacobson
Purpose
Software version 4.04 for the model 7AF implements two new features and provides improved error
reporting. If upgraded from a version before v3.00, new FloPro runtime software, version 2.776, will be
automatically installed. Likewise, new screen files (.GRS) are used and are automatically installed. This
software must use Robot Macros, V2_04.MAC or above for ESC 100 controllers (version 2.05 included)
and RP212.MAC for ESC 212 controllers! For square media, macros SQ212.MAC are included as an
alternative to RP212.MAC.
Exhaust Monitor
It is now possible to detect an exhaust system failure from a customer-supplied contact. This is important for
customers who grind wafers made of materials such as Gallium Arsenide that produce hazardous residue. If
this feature is used, sensing a failure will prevent grinding, dressing, or truing, and will abort any of those
operations if they had already begun. An alarm will be sent to the touch-screen and will be sent to GEM, if
the GEM option is used.
A customer-supplied low-current dry-contact switch should be connected to Opto-22 input number 20 at the
rear of the 7AF. When the exhaust is working properly, the switch will be closed and the input will read ON.
In case of a failure, the switch will be open and the input will read OFF. For further details, see the hardware
documentation. Note, however, that input 20 will display as 21 on the Inputs/Outputs screen of Machine
Maintenance. (All hardware input numbers are bumped up by one on that screen.)
If a customer-supplied exhaust monitor is not installed, the Machine Variable in Exhaust Monitor (variable
67) should be set to 0.0, which is the default value. Setting this variable without the hardware installed will
result in an “Exhaust Fail” Fault and will prevent grinding.
When the hardware is installed and a non-zero value is placed into the Machine Variable, the software will
constantly monitor the input sensor to make sure that it is ON. If it should turn OFF, indicating that there is
a failure, the alarm will sound and grinding will abort. Set the Machine Variable in Exhaust Monitor
(variable 67) to 1.0 to turn on software monitoring.
To Next Page
Loading...
