Raising the Probes During Grinding
The normal behavior of the 7AF is to raise the probes after the Dwell step of the grind cycle. Some
customers have requested that the probes be raised before the Dwell instead. To accomplish this change, set
the Machine Variable in Raise Probe Before Dwell (variable 97) to 1.0. If the default value 0.0 is kept, the
original behavior will be used.
Other Features
Alarms have been added to help diagnose “Grind Abort” faults. These include the “Right/Left Spindle Servo”
as well as “Right/Left Condition Arm” and “Right/Left Grind Seal” to pinpoint inverter or switch errors.
These usually appear on the screen, but if that displays “Grind Abort”, check for these in the Fault Log in
Grind Data.
The “Rotational Home” fault has been split into three messages to pinpoint the spin station and work chucks.
A small change has been made to robot macros RP212 and SQ212 to permit slow flipping of the robot end
effector. This is helpful if wafers are ground extra thin.
7AF Version 4.05 Features
10/20/98 Steve Jacobson
Purpose
Software version 4.05 for the model 7AF includes three changes for improved processing of square wafers.
A new version of SQ212.MAC is included and should be downloaded to the Equipe controller. There is no
reason to upgrade unless you grind square wafers.
Angle Between Robot and Pre-Aligner
Software compensates for the angle offset between robot and pre-aligner to insure that square wafers
maintain proper square alignment. In software versions 4.01 to 4.04 this angle was present in the robot
macros. It is now being moved to the Station Coordinates The angle used in 4.01 to 4.04 is 9.25 degrees.
This angle must be transferred to the station coordinates for future versions of the 7AF software as described
here.
The following process need only be done once. Exit from the 7AF software to MS-DOS. All the Equipe
commands to be typed must be in capital letters, except for one small letter c. Start the Equipe software by
entering:
CD C:\EQUIPE
EQT
This presents a menu of choices. Ignore those choices for now and enter these Equipe commands:
SWP 150,3750,12
SCSI C,0,925
SCSI c,0,925
RSA
SAV
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