This has saved the 9.25 degree angle into the Equipe Controller. It should also be saved into the Station
Coordinates file on disk drive C which can be done as follows while you are still in the Equipe software.
Press ALT-S to save the station information. This will prompt you for the name of a disk file to use. The
name you enter should be of the form R______.COR where the fill-in is the serial number of the 7AF. If you
prefer to keep the original station coordinates file unchanged, you may use today’s date for the fill-in, e.g.,
R981020.COR. Saving this information will take a few seconds and will display a pointy bracket “>” when it
is finished.
Then exit the Equipe software by pressing the Escape key. You are now back in MS-DOS and can start the
7AF software by entering RUN7AF.
Stopping a Race at the Spin Station
It was observed that the robot could start its GET at the spin station before the spinning had completely
stopped. This could happen on the final two wafers of a grind cycle, resulting in a wafer not being square to
the receive cassette and bumping into it instead of being inserted smoothly. A modification makes the robot
wait until spinning has stopped. This modification will remain in future versions of the software.
Assisting GET at the Work Chucks
To prevent difficulty lifting the wafers from the work chucks once those chucks were wet, a delay was placed
into the robot macros to postpone the lift and allow time to start the blowoff. This delay before lifting will
become standard in the next software release, 4.06, and will apply to both work chucks and the spin station.
Values for the delay will be placed into the station coordinate file as described above for the angle between
robot and pre-aligner. A delay of zero will be allowed. This change will allow different delays to be added
as needed by different customers.
7AF Version 4.06 Features
3/3/99 Steve Jacobson
Purpose
Software version 4.06 for the model 7AF consists of one change to the rotational homing of the three spin
chucks. Under certain conditions, the spin station refuses to spin. Usually this can be corrected by powering
off the 7AF and restarting, but this software change eliminates the problem and the need to power off.
7AF Version 5.00 Features
06/15/99 Steve Jacobson
Purpose
Software version 5.00 for the model 7AF includes optional protection for the rubber grind seals, optional
timing changes to assist with wafer handling, and a few ease-of-use improvements. A major change is that
certain information previously stored as machine variables is now incorporated into each wafer recipe. This
prevents operator error if a recipe is selected that changes the kind of grinding or the wafer shape but the
operator fails to update the machine variable. New robot macros are included and MUST be downloaded if
you use a series 212 robot. A “version number” suffix will be added to help identify versions of macros. The
latest macros are V2_05.MAC and RP212_02.MAC and SQ212_02.MAC.
To Next Page
Loading...
