Robot Macros Merged for Square and Round Wafers (Equipe Model 212 only)
With the inclusion of square wafer grinding in software version 4.01, users have been able to set up their 7AF
for square or round wafers by downloading either SQ212.MAC or RP212.MAC. The ALIGN macro would
correctly align square or round wafers depending on which set of macros was downloaded. These two
macro sets have now been merged. RP212.MAC, now called RP212_02.MAC, is still available for 7AF’s
that have not been upgraded to allow use of square wafers. SQ212.MAC, now called SQ212_02.MAC, is
the preferred macro set for 7AF’s that have the square wafer firmware in the Equipe controller.
Using SQ212_02.MAC, it is possible to grind square or round wafers by setting a value in the wafer recipe.
(See the next section.) It is not necessary to exit the 7AF software to download new macros for a new wafer
shape. Previously, machine variable 82, which is no longer used, distinguished between round silicon and
square AlTiC (Aluminum Titanium Carbide).
RP212_02.MAC aligns round wafers only. Trying to align square wafers will result in a Prealigner Error
fault that can be cleared by homing the prealigner, i.e., pressing the prealigner icon on the Home screen. You
can still grind square wafers without aligning them by using the Prealigner Bypass. (This used to be machine
variable 83. However it now is stored in the wafer recipe, and machine variable 83 is no longer used.)
The ALIGN macro will now only align round wafers and new names are needed for the other choices. The
new names are given in the following list. Some earlier names (CUT, CT6, and RALIGN) had been
documented previously, but only the following names will be permitted beginning with software version 5.00.
ALIGN align round wafers
SLIGN align square wafers with a cut corner on each wafer
XLIGN align square wafers not requiring a cut corner on each wafer
Grind Mode and Align Mode
The Edit Recipes menu has new buttons labeled Grind Mode and Align Mode.
Grind Mode allows you to select one of the choices Target, Delta, or Force, and to store this with each
recipe. The name “Force” refers to fine wheel grinding where the target is a force in pounds, rather than a
length in microns. Grind Mode replaces the use of machine variables 82 and 84, which were formerly called
ATC Grinder and Delta Grind and are now unused.
Align Mode allows you to select one of these four choices: round wafer, square wafer with a cut corner,
square wafer not requiring a cut corner, bypass the prealigner, and to store this choice with each recipe. The
first three choices replace the downloading of different macro sets, which is no longer required, and the
fourth choice replaces the use of machine variable 83, which was formerly called Prealigner Bypass and is
now unused.
The values chosen for these modes will display at the top of the Edit Recipes and Grind Cycle screens.
Three Optional Timing Changes
When the robot picks up a wafer from the work chucks and the spin station, the normal operation is this:
a. Turn off the work chuck or spin station vacuum.
b. Move the robot over the wafer. Lower the robot to the wafer. Turn on the robot vacuum. The
robot senses the wafer.
c. The robot starts to lift the wafer.
d. The work chuck or spin station blowoff turns on to assist the robot.
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