The first optional change is a pause between (b) and (c). It has the effect of re-ordering the list as a,b,d,c. It
has been helpful in some situations to have the blowoff begin before the robot starts to lift. With very heavy
wafers, the robot can experience a servo fault if it starts to lift without the assistance of the blowoff.
The second optional change postpones turning off the work chuck or spin station vacuum, interchanging (a)
and (b) in this list. This is especially useful for very thin wafers with tape, minimizing the time the wafer
spends with no vacuum to hold it flat. If this change is made, it is desirable to have a delay between turning
off the work chuck or spin station vacuum and turning on the work chuck or spin station blowoff.
The third optional change is the length of time for the blowoff to remain on.
How to request a delay before the robot lifts up: (Equipe Model 212 only)
This delay happens entirely within the robot controller, so it is there that the length of this pause must be
stored. Use the Station Coordinates for stations D (Left Chuck), E (Right Chuck), and f (Spin Station).
Note the small letter “f”. A delay of zero retains the original behavior. Otherwise specify a number of
milliseconds to delay at each station. However this will use only seconds and tenths, so a delay of 4567 will
be changed to 4.6 seconds. If you do not request a delay, the original stored value zero will produce no
delay.
To set a delay of 1.2 seconds for the spin station and a delay of 0.5 seconds for the right work chuck, enter
the following commands. In this example it may be necessary to change the SWP command for a different
wafer thickness.
This process need only be done once. Exit from the 7AF software to PC-DOS. All the Equipe commands to
be typed must be in capital letters, except for one small letter f. Start the Equipe software by entering:
CD C:\EQUIPE
EQT
This presents a menu of choices. Ignore those choices for now and enter these Equipe commands.
(Note that 500 and 1200 are only examples.)
SWP 150,1875,25
SCSI E,0,500
SCSI f,0,1200
RSA
SAV
This has saved the pauses into the Equipe Controller. They should also be saved into the Station
Coordinates file on disk drive C which can be done by exiting EQT to DOS and running the new program
stations. If you use multiple Station Coordinate files at your installation, it may be less work to use the DOS
editor to place the pauses into each of those files. Of course, different delays are allowed in different
coordinate files. (Note: You may also use EQT to save coordinates, but that will not save your scanning
coordinates.)
Enter the command stations to save the station information. This will prompt you for the name of a disk file
to use. The name you enter should be of the form ______.COR where the fill-in may use today’s date, e.g.,
R990701.COR. Saving this information will take a few seconds.
You can start the 7AF software by entering RUN7AF.
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