STRASBAUGH CONFIDENTIAL INFORMATION
1
7AF Version 5.05 Features
10/30/2000 Steve Jacobson
Purpose
Software version 5.05 expands the No-Flip Option introduced in version 5.04 to include all cassettes. It also
introduces grinding of “rough” wafers. There are also some bug fixes and the ability to clean the chucks
periodically while the 7AF is idle.
Do Not Flip Wafers at the Cassettes
Software version 5.04 allowed wafers to be moved from the spin station to the receive cassettes without flipping
over. This choice filled the receive cassettes from bottom to top. Now it is possible to request that wafers do
not flip over when being moved from the send cassettes to the pre-aligner. When this choice is made, wafers will
be removed from the send cassettes from top to bottom.
This feature is sold separately as a software option called “No Flip” having Strasbaugh Part Number 248211.
When the option is purchased, you will receive an additional floppy disk that will unlock the option for use, as
well as instructions telling how to request “No Flip”. To use No-Flip, download Series 212 macro file
sq212_06.mac or rp212_06.mac or Series 100 macro file v2_07.mac. You may also use the previous version
sq212_05.mac or rp212_05.mac or v2_06.mac.
There are four choices that can be made. No-Flip can be requested for both send cassettes or both receive
cassettes or all cassettes or no cassettes. You cannot request No-Flip at only one of the two send cassettes or
only one of the two receive cassettes. Requesting No-Flip is done by modifying the robot station coordinates for
the appropriate stations.
Automatic Clean Chucks
During the grind cycle, the work chucks are conditioned after each wafer. Now there will be additional chuck
conditioning. If the 7AF is left at the Grind Cycle screen and is not processing wafers, the chucks will be
conditioned every fifteen minutes. Just before each of these extra conditionings, there will be an alarm bell and a
message on the screen to warn that conditioning is about to begin and that parts, including the bridge, are about
to move. The GEM Host can look for Process State 22 to see whether this is happening. A request to start
grinding will be rejected until conditioning ends (after about one minute if both chucks are being used). This
feature can be turned on or off using machine variable 16, Auto Clean Chucks 0=No.
Altitude Above Sea Level
If a 7AF is located above sea level, it has been getting incorrect values for its vacuum readings. For example, at
5000 feet, an idle 7AF, which should read zero inches of Mercury, actually reads (-3.7). This causes problems
when a test is made for sufficient vacuum. If you experience this problem, set machine variable 39, Altitude
Vacuum Adjust, to zero. Then read the work chuck vacuum from the screen while the 7AF is idle. Finally,
return to machine variable 39 and set it to the number you just read.
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