STRASBAUGH CONFIDENTIAL INFORMATION
3
Drain Failure and Reserve PSI
In software version 4.04 monitoring was provided to test for an exhaust failure. Such a failure would abort a
grind or a dress and would prevent a new grind or dress from beginning. Additional hardware was required.
This kind of monitoring is now available for a drain overflow failure and /or a PSI failure. For the PSI monitor,
an extra reserve PSI supply is activated in case of a main PSI failure. This provides enough air pressure to
supply the air bearings during the time needed to abort the grind or dress. These all require extra hardware.
To activate monitoring, set machine variable 67, Exhaust,Drain,PSI Monitr to
1 for exhaust monitor
10 for drain failure monitor
100 for reserve PSI monitor
or to a sum of these to monitor multiple conditions. If you do not have the extra hardware, you must set the
corresponding digits of machine variable 67 to zero in order to operate the 7AF.
Other New Features
A software bug was introduced in version 5.02 that can cause a grind cycle to abort if you open the operator
door, also called the gull-wing door. That has been corrected.
The requirement that you must select Left_Off or Right_Off in machine variable 18 in order to select Special
Options in machine variable 19 has been dropped.
The following changes have been made to the display screens.
Wafer diameter and spin station vacuum and spin station rpm are added to the Home screen and to the
Inputs/Outputs screen. On the Home screen, the wafer diameter is the value from the Defaulto recipe. On the
Inputs/Outputs screen it is the wafer size that was most recently scanned. (It displays as question marks if no
wafers have been scanned.)
An indication “+TAPE” is added to the Edit Recipes screen as a reminder that the current recipe includes tape
thickness as part of its target thickness.
Different labels had been used previously to describe the position of the conditioning arm as over the chuck or
not over the chuck. Those have been renamed so that they are either over or park.