May 21, 2001 7AF Software Version 5.07 Features
STRASBAUGH CONFIDENTIAL INFORMATION
1
7AF Version “5.07” Features
05/21/2001 Steve Jacobson
Purpose
Software version 5.07 allows you to move the values for Cassette Pitch and Wafers per Cassette out of the
machine variables. You can set them by choosing a grinding recipe instead. It is possible to have different
values in different recipes and also possible for the send and receive cassettes to differ from each other. There
are some screen changes and new grind cycle halts due to vacuum errors. As an aid in removing water, the
ground wafer can be spun before leaving the work chuck. You can also vary the robot speed at different
stations. New robot macros, called RP212_07.MAC, SQ212_07.MAC, and V2_08.MAC, contain many of
these changes. An additional feature is the ability to run the 7AF with two fine wheels or two coarse wheels.
Cassette Pitch and Wafers per Cassette
These can be set in machine variables 80 and 81. Positive values in those variables are obeyed. Zero in either or
both variables produces the default values of 25 wafers per cassette with pitch 0.1875 inches. (Except that the
pitch becomes 0.2500 inches for eight-inch diameter wafers.) Negative values were undefined until now.
At the same time, there have been pitch settings in the robot coordinates, but those values were ignored.
The new behavior is triggered by a negative value in both machine variables. That now tells the software to look
for these values in the robot coordinates instead. For both send cassettes, use the pitch of station A. For both
receive cassettes, use the pitch of station G. For wafers per cassette, use the “pitch” of station C as the number
of slots in the send cassettes, and the “pitch” of station F as the number of slots in the receive cassettes.
To use different values with different recipes, you will need to associate robot coordinate files with grinding
recipes. If you do not already do this, it is explained in the release notes for software version 5.01.
Then you proceed as in this example. In recipe cycle_1 you want to use cassettes with pitch 0.3750 inch and
twelve slots. In recipe cycle_2 you want the same send cassettes as cycle_1 but you want receive cassettes with
pitch 0.5 inch and nine slots. You have associated cycle_1 with robot coordinates coord1.cor and cycle_2 with
robot coordinates coord2.cor.
Modify coord1.cor so that the pitch is set as follows.
PITCH A,3750
PITCH G,3750
PITCH C,12
PITCH F,12
Modify coord2.cor so that the pitch is set as follows.
PITCH A,3750
PITCH G,5000
PITCH C,12
PITCH F,9
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