May 21, 2001 7AF Software Version 5.07 Features
STRASBAUGH CONFIDENTIAL INFORMATION
2
For the pitch at other stations in these files, set B the same as A, H the same as G, c the same as C, and f the
same as F.
Finally, change machine variables 80 and 81 so that each is: –1. Do not set just one of these; set both.
Note the required decimal point in the machine variable for pitch, and the omitted decimal point in the robot
coordinate file. Another rule is that pitch values are limited to four digits. Use of 9999 gives approximately
one-inch of pitch, and is the largest value allowed by the software.
Also note that new robot macros, included with this software version, are required if you use this feature.
If pitch and slots are being set from the robot coordinates, the values displayed on the monitor will be incorrect
until the correct values are read. The incorrect values displayed are 0, 0, 25, 25 until that time.
Varying the Robot Speed
The robot speed is set in the Robot Parameter File and is used at all stations of the 7AF. On a new 7AF, the
robot speed and acceleration are set initially in Equipe units as:
Theta 949.6 1101.0
Radial 39.99 30.10
Z 12.00 24.00
They may have been slowed down, and the slowdown applies to all stations. You should not speed them up.
In the new software version, it is possible to use the coordinate special items of the (otherwise unused) station g
to hold speed and acceleration information for an alternative slow speed and for telling when to use it.
Item Value
0 Flags for Get Wafer: A number from 0 to 31 which is the sum of these values:
16 = Use slow speed for Get from the send cassettes (stations A,B)
8 = Use slow speed for Get from pre-aligner (station c)
4 = Use slow speed for Get from work chucks (stations (D,E)
2 = Use slow speed for Get from spin station (station f)
1 = Use slow speed for Get from the receive cassettes (stations G,H)
For a slow speed for the wafer after it has been ground, set this to 6, ie, 4+2.
1 Flags for Put Wafer: A number from 0 to 31 which is the sum of these values:
16 = Use slow speed for Put into the send cassettes (stations A,B)
8 = Use slow speed for Put onto pre-aligner (station C)
4 = Use slow speed for Put onto work chucks (stations D,E)
2 = Use slow speed for Put onto spin station (station F)
1 = Use slow speed for Put into the receive cassettes (stations G,H)
For a slow speed for the wafer after it has been ground, set this to 3, ie, 2+1.
2 The slow speed for the Theta axis
3 The slow speed for the Radial axis
4 The slow speed for the Z axis
5 The slow acceleration for the Theta axis
6 The slow acceleration for the Radial axis
7 The slow acceleration for the Z axis
The software tests at appropriate times whether fast or slow speed is desired and sets the desired speed. If you
use this feature, please save your robot coordinates with the new version of stations.exe that saves station g.
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