May 21, 2001 7AF Software Version 5.07 Features
STRASBAUGH CONFIDENTIAL INFORMATION
3
Extra Motion Up/Down Away From the Wafer
When thin wafers are placed at the receive cassette, sometimes a greater vertical move of the robot end effector
away from the wafer is needed to prevent the robot pulling the wafer out of the cassette when the robot retracts.
By placing a value into robot coordinate special item 11 for a particular station, you can request this extra
motion up or down at the end of PUT. Use the value 1000 for an inch, 500 for a half-inch, etc. If the robot end
effector is above the wafer at station G, then SCSI G,11,250 requests an extra quarter-inch lift up after
placing the wafer at station G. If the end effector is below the wafer at station G, then SCSI G,11,-250
requests an extra quarter-inch drop down after placing the wafer at station G. If you accidentally use the wrong
sign, the motion would break the wafer, so the motion will not take place. It will be as if the coordinate special
item contained a zero.
Robot Vacuum Delays
It is possible to delay turning the robot vacuum on or off during GET and PUT. The vacuum delays are set in
the coordinates for station C but apply to all stations. The delay is in milliseconds so the value 1000 represents
one second. For a half-second delay before turning on the robot vacuum in GET, use SCSI C,2,500 and
for a tenth second before turning off the robot vacuum in PUT, use SCSI C,3,100
Weakening the Recipe Consistency Check
A test was added recently for recipe consistency. This verifies that recipe steps proceed down and that the lift
proceeds up. It also tests that the recipe does not intend to grind the wafer thinner than allowed. At one 7AF,
some of these tests interfered with the way that 7AF was used. If you change the hundreds digit of machine
variable 19, Special Options, to 1, two of the tests are turned off. You will be allowed to have a final grind
target as low as zero microns and you will be allowed to have a lift of zero microns. Thus variable 19 has this
new meaning:
100 Weaken the recipe consistency check.
10 Allow low work chuck vacuum.
1 Allow and ignore pre-aligner errors.
You may add combinations of these numbers to obtain combined features.
Some Screen Buttons Have Been Removed
The unused Help buttons have been removed from the screens. An unused button for the robot icon has been
removed from the Machine Maint screen. Under Machine Setup, three yellow buttons were removed. Two of
them were unused and the third did something that other buttons on that screen could duplicate. Finally the
buttons labeled Calibrate Servos and Machine Setup have also been removed from that screen. They gave access
to the upper and lower halves of the list of machine variables. Now the entire list is available as soon as you
arrive on this screen.
If you use password protection, there is a small amount of work to be done as a result of this change. The
password protection by buttons becomes invalid when you install this software. You need to run the program
pass7af to re-create your preferred scheme. To do that, the password supervisor exits to DOS and enters the
command pass7af<Enter> This brings up a screen on which to enter the supervisor password. Do that and
then press the button labeled Next. This brings you to the screen where you select which buttons may be
pressed. Begin by choosing one of the standard schemes near the lower right. You may use that scheme or you
may modify it by selecting individual buttons for individual permissions. Finally press Save and then press Quit.
This returns you to the original screen. Press Quit once more and the program exits to DOS. Run the 7AFBAK
command to save on a floppy disk the change you just made.
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