May 21, 2001 7AF Software Version 5.07 Features
STRASBAUGH CONFIDENTIAL INFORMATION
4
Vacuum Errors
If a vacuum error occurred during the work chuck conditioning or during the rinse/spin cycle, the conditioning
or the rinse/spin was skipped but wafers continued to be processed. These errors will now cause the entire grind
cycle to gradually come to a stop. It will not be a sudden abort. Things will continue as far as they can, until it
is time to move a wafer onto the chuck or the spin station where the vacuum error occurred. All movement will
then stop.
Extra Spin of the Wafer on the Work Chuck
Software version 5.06 allowed you to add some extra spinning of the wafer on the work chuck at the end of the
Lift step of the grind cycle, so that water could rinse off any leftover grind debris. You set the time of that rinse
with machine variable 46. After the rinse, the chuck would continue to spin until the bridge moved to expose the
chuck. Then it would stop. Now it is possible to specify additional drying time after the bridge has moved to
expose the chuck. Machine variable 44, Chuck Wafer Dry secs, gives the number of seconds for drying. The
rotational speed of the chuck for the rinse and/or dry is the same speed as it had during the Lift step. Use of the
rinse and/or dry features will reduce throughput.
Pre-aligner Adjustment (Equipe Series 212 only)
Users of square wafers have needed to set the angle between the robot and pre-aligner to make sure that the
square wafers remain at the correct angle throughout processing. Recently a user of round wafers has requested
the ability to save this angle too. By placing the SFAA value into the station coordinates as SCSI c,0,value
Series 212 users can adjust this angle.
Dual Fine Grind and Dual Coarse Grind
If you purchase option 248313 you will be able to operate the 7AF with two fine wheels or two coarse wheels.
See the document DualFine.doc for a full explanation. In order to facilitate this new feature, the names of the
Grind Data files have changed for all users of 7AF. The files currently being used are named Leftdat.txt and
Rightdat.txt. When those are saved, they are renamed with letters and numbers using a scheme like L173.dat
and R173.dat. The old names, Coarsdat.txt, Finedat.txt, C173.dat, F173.dat will no longer be used. Some
messages have also been changed to refer to Left and Right grind wheels instead of Coarse and Fine.
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