Strasbaugh nTellect (Model 7AF) Wafer Grinder
3 - 6 Version 1.2 - June 2004
The action of the single-acting interlocks is identical to that of the double-acting
switches with the exception that the single-acting switches cannot be defeated.
No Double-acting Single-acting Disconnect
Interlocks Interlocks Interlocks Enclosure
Doors Doors Doors Door 20
7, 8, 9 10, 17, 18 5, 6, 12, 13,
14, 15, 16, 19
The interlock switches for doors 10, 17, and 18 and the Emergency Off push buttons
(EMO's) are wired together in series. The EMO's are normally closed, and the
interlock switches are wired as normally open. Two EMO's are installed on the
machine.
Effects of Opening Doors
Opening door 10, 17, 18, or 20 at any time shuts power down to the entire machine,
including the control computer. Recover by manually clearing any leftover wafers,
powering up and rehoming the machine.
Opening door 12, 13, 14, 15, 16, or 19 during an auto grind cycle terminates the cycle
and inhibits the servos. Recover by manually clearing any leftover wafers and
restarting the auto cycle.
Opening door 7, 8, or 9 has no effect on machine power or the cycle running.
Opening door 5 or 6 halts the cycle; closing doors 5 and 6 resumes the cycle. (Their
function is similar to that of the Pause Cycle button on the Grind Cycle menu.)
Limitations on Opening of Cassette Turrets
Operators may NOT access a turret while the robot is accessing it.
Two turrets adjacent to each other may NOT be accessed by the operator at the same
time.
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