Operations and Maintenance Manual Physical Description
Version 1.2 - June 2004 3 - 5
OPERATOR DOORS (DOORS 5 AND 6)
Door 5 (the left side operator door) and door 6 (the right side operator door) open
manually without latches for operator convenience.
CASSETTE TURRETS (DOORS 1, 2, 3, AND 4)
The four cassette turrets are software controlled to provide operator access to the
wafer cassettes.
INTERLOCK SAFETY SWITCHES
The operator and service doors are equipped with interlock safety switches. One or
more open interlocks interrupt(s) the auto cycle or inhibit the servos.
WARNING: Do not override safety interlocks. All procedures in the 7AF
Operation and Maintenance Manual are written to be
performed with the door interlocks closed while the machine is in
motion.
Twelve of the 7AF doors have interlock switches. For doors equipped with double-
acting spring loaded switches (see the table below), when the service door is in place,
the switch plunger is depressed, and the contact is closed. When the door is out of
position, the switch contact is open. The switch contact can only be closed without
the door present by pulling the switch plunger forward until the spring is out of the
plunger's detent and the switch contacts are closed.
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