RHK Technology R9 - Slope Compensation Range; Internal Piezo Modulation; Figure B.26. Scan Processor; Figure B.27. Slope Compensation

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Hardware Space Components

Figure B.26. Scan Processor

B.10.1. Slope Compensation Range

The X and Y slope compensation control accepts percentage values.

Figure B.27. Slope Compensation

B.11. Internal Piezo Modulation

The Internal Piezo Modulation icon is a Numerically Controlled Oscillator (NCO) that is used to

provide modulation on any of the High Voltage Amplifiers. The settings for this oscillator are mostly the

same as those used in the Bias Drive as described in Section 4, “STM Bias”. In addition to the Sine

Output are controls for Attenuation as are present in the Bias Drive. The Internal Piezo Modulation

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default chapter3
- Table of Contents3
- About this Quick Start Guide14
- Significant Changes in R9S 4.016
- Significant Changes in R9S 4.218
- Significant Changes in R9S 5.020
- Significant Changes in R9S 5.222
Chapter 1. Prepare Your SPM System27
- Check the Hardware for Damage27
- Configure the Power27
- Figure 1.1. Check the R9 for Damage27
- Connecting the Ethernet28
- Figure 1.2. Location of Power, Frequency, Voltage and Serial Number Information28
- Ethernet Connection29
- Using more than One Ethernet Communications Link29
- Start and Try the R9 Control System Software (R9S)29
- Figure 1.3. Ethernet Connection Diagram29
- Opening R9 Software (R9S)30
- Understand IHDL™ and the R9 Software Components30
- Figure 1.4. R9 Dashboard30
- Open a Preconfigured IHDL™ File31
- Figure 1.5. Opening a Preconfigured IHDL32
- Figure 1.6. Selecting the Workbench Tab32
- Figure 1.7. RHK UHV300 Preconfigured STM Hardware Workbench33
- Workbench User Interface Component Overview34
- Figure 1.8. UHV 300 STM Hardware Workbench Overview34
- Components of Interest35
- Figure 1.9. Hardware Space36
- Initial Testing of the R9 Controller37
- Figure 1.10. Save the IHDL with a New Name38
- Figure 1.11. Auto-Backup IHDL Files38
- Figure 1.12. Workbench - Testing UHV 300.Ihl39
- Initial Tests40
- Figure 1.13. R9S Testing Screen Using the Testing UHV 300 Ihl40
- Measuring Preamplifier Noise and Adjusting Input Circuit Parameters42
- Figure 1.14. Oscilloscope - Topography and Current42
- Figure 1.15. Testing the Input Offset43
- Figure 1.16. Spectrum Analyzer Result at Full Bandwidth44
- Adjusting Bias Voltage Parameters45
- Figure 1.17. Spectrum Analyzer Result with 2 Khz Filter with 48 Db Rolloff45
- Figure 1.18. Bias Voltage and CH1 Drive Settings46
- Figure 1.19. Bias Modulation through the Tunneling Gap Simulator47
- Further Testing48
Chapter 2. Connect Your Microscope49
Chapter 3. Approach50
- Approach Settings50
- Feedback Settings51
- Figure 3.1. Open the Approach Procedures Panel51
- Figure 3.2. Typical Dashboard for STM52
- Fast in53
- Slow Approach53
- Figure 3.3. Camera View of the Tip and Sample53
- Adjusting the Position with Single Steps54
- Operating Mode Switching55
- Figure 3.4. Z Feedback Bar55
- Figure 3.5. Mode Switching55
Chapter 4. Acquire an Image57
- Verify the Available Signals57
- Figure 4.1. Checking the Available Signals57
- Configure Scan Settings58
- Figure 4.2. Scan Area Window Main Panel58
- Table 4.1. Z Bar Zoom Ranges59
- Figure 4.3. Scan Area Window - Advanced, Save60
- Figure 4.4. Scan Area Window - Tip Standby Position60
- Multi-Height Imaging61
- Figure 4.5. Scan Area Window - Nav Config., Image Settings61
- Begin Image Acquisition62
- Figure 4.6. Multi-Height Imaging62
- Figure 4.7. Open an Image Window63
- Figure 4.8. Open an Image Line63
- Optimizing Feedback and Scanning Parameters64
- Drift Correction65
- Figure 4.9. Scan Area Window - Drift Settings65
- Figure 4.10. Automatic Drift Correction66
- Automatic Drift Correction67
- Manual Drift Correction67
- Image+Spectroscopy Mode67
- Points67
- Line68
- Figure 4.11. Image+Spectroscopy - Points68
- Figure 4.12. Image+Spectroscopy - Line68
- Region69
- Line Spectroscopy with Image Line Verification69
- Figure 4.13. Image+Spectroscopy - Region69
Chapter 5. Display and Analyze Your Image70
- Browser70
- Figure 5.1. File Explorer View70
- Basic Image Processing71
- Background Removal71
- Figure 5.2. Shadow Style Artifact from X Offset Subtract71
- Filtering72
- Displaying SPM Images72
- Image Manipulation72
- Figure 5.3. Image Manipulation72
- Display Image in 3D Format73
- Figure 5.4. Pre-Processing Data Mode and Color Map Mode73
- Export the SPM Image74
- Displaying Spectral Data on an Image74
- Figure 5.5. Interactive 3D74
- Figure 5.6. Image+Spectroscopy - Display Spectral Data75
- Locating SM4 Data Files76
- Figure 5.7. Locating SM4 Data Files76
Chapter 6. Acquire Spectroscopy Data77
- Configuring the I/V Ramp Spectroscopy Settings77
- Figure 6.1. Dashboard View of the IV Ramp Spectroscopy Settings78
- Figure 6.2. Spectroscopy - Alternate Scan Direction: Disabled79
- Figure 6.3. Spectroscopy - Alternate Scan Direction: Enabled79
- Starting an IV Spectroscopy Procedure80
- Figure 6.4. Graphical Representation of Ramp Spectroscopy Timings80
- Figure 6.5. Scan Area Window Access to Spectroscopy Procedures81
- DI/DV Spectroscopy Measurements82
- Figure 6.6. the Preconfigured UHV300 Ihl82
- Figure 6.7. Dashboard for Uhv300.Ihl83
- Figure 6.8. Example I/V Spectroscopy Measurement on a Pair of Back to Back Fets83
- Figure 6.9. Spectroscopy Settings and Circuit Diagram for the Trial DI/DV Spectroscopy84
- Figure 6.10. Modification to Pre-Configured UHV300 Dashboard84
- Background for DI/DV Measurement85
- Figure 6.11. the 'DI' Oscilloscope Trace for 2Mv Oscillation Amplitude Shown above and a Series Resistance of 200 Meg Ohms85
- Figure 6.12. I/V and DI/DV Spectroscopy Plots86
- Figure 6.13. Pictorial Representation of DI/DV87
- Figure 6.14. Interferometer Feedback88
Chapter 7. Analyze Spectroscopy Data89
- Analyzing Spectroscopy Data89
- Display and Analyze Your Spectroscopy Data89
- Exporting Your Spectroscopy Data90
- Figure 7.1. Spectroscopy90
- Figure 7.2. Two Different Kinds of File Export Format, Picture File and ASCII File91
Appendix A. IHDL Element Details92
- Overview of a Hardware Item92
- Figure A.1. Hardware Space Properties92
- Hiding Dashboard Panels to Ribbon93
- Figure A.2. Hiding Dashboard Controls93
- Overview of an R9 Control94
- Figure A.3. Hiding Dashboard Panels to Ribbon94
- Figure A.4. Showing Panels on the Ribbon94
- Figure A.5. R9 Controls95
- Figure A.6. Ramping R9 Controls95
- User-Configurable Max/Min Ranges on Data Entry96
- Figure A.7. User-Configurable Limits on Data Entry96
- Figure A.8. Settings for User-Configurable Limits96
- Adding Procedure Panel to Hardware Composites on the Dashboard97
- Configure Measure Items97
- Figure A.9. Adding Procedure Panels to Composites on the Dashboard97
- Figure A.10. Preconfigured STM Measure Items98
Appendix B. Hardware Space Components99
- Channel 1 Drive and Channel 2 Drive99
- Hardware Space99
- Figure B.1. Channel 1 Drive - Hardware Space99
- Block Diagram of Output Circuitry100
- Property Panel in Hardware Space100
- Figure B.2. Block Diagram of Drive 1 and Drive 2 Output Circuitry100
- Figure B.3. Channel 1 Drive - Property Panel in Hardware Space100
- Table B.1. Channel 1 Drive Output100
- Channel 1 Input and Channel 2 Input103
- Hardware Space103
- Figure B.4. Hardware Space - Channel 1 Input103
- Block Diagram of Input Circuitry104
- Property Panel in Hardware Space104
- Figure B.5. Block Diagram of Channel 1 and Channel 2 Input Circuitry104
- Figure B.6. Property Panel in Hardware Space104
- Channel 3 Input and Channel 4 Input106
- Hardware Space106
- Block Diagram of Input Circuitry106
- Figure B.7. Hardware Space - Channel 3 Input106
- Figure B.8. Block Diagram of Channel 3 and Channel 4 Input Circuitry106
- Property Panel in Hardware Space107
- Figure B.9. Property Panel in Hardware Space107
- CH5 Input108
- STM Bias108
- Figure B.10. CH5 Input in Hardware Space108
- Figure B.11. STM Bias108
- Lock-In Amplifiers109
- Hardware Space109
- Figure B.12. Lock-In Amplifier - Hardware Space109
- Using the Lock-In Amplifier as a Low Pass Filter110
- Figure B.13. Lock-In Amplifier - Low Pass Filter110
- Using the Lock-In Amplifier for DI/DV Measurements111
- Lock-In Amplifiers Operating Independent of the High Speed Inputs111
- Figure B.14. Lock-In Amplifier Used for DI/DV111
- Feedback Loops112
- Figure B.15. Lock-In Amplifier Operating Independent of the Inputs112
- Figure B.16. Feedback Loop Controllers113
- Figure B.17. Feedback Loop Connections113
- Auxiliary PI Feedback Controller115
- Figure B.18. Auxillary PI Feedback Controller115
- Figure B.19. aux PI Input in Hardware Space115
- Kelvin PI Feedback Controller116
- Figure B.20. aux PI Input Settings116
- Figure B.21. Kelvin PI Feedback Controller116
- Figure B.22. Kelvin PI Input in Hardware Space116
- Filters for High Speed Inputs117
- Transient Recorder117
- Figure B.23. Kelvin PI Input Settings117
- Figure B.24. Filters for High Speed Inputs117
- Scan Processor118
- Figure B.25. Transient Recorder118
- Slope Compensation Range119
- Internal Piezo Modulation119
- Figure B.26. Scan Processor119
- Figure B.27. Slope Compensation119
- Figure B.28. Internal Piezo Modulation120
- High Voltage Amplifiers121
- Figure B.29. Internal Piezo Modulation Output121
- Figure B.30. High Voltage Amplifiers121
- Figure B.31. High Voltage X Scan Signal Output Examples122
- Status Adcs124
- Pulse Counting124
- Figure B.32. Status A/D Inputs124
- Figure B.33. Pulse Counting124
- TTL Inputs and Outputs125
- Figure B.34. TTL Output125
- Forth Scripts126
- Description126
- Figure B.35. Forth Scripts126
- Figure B.36. Description126
- Measure Item127
- Figure B.37. Measure Item127
- Data Channels Have User-Configurable Names128
- External Hardware Devices128
- Preamps128
- Figure B.38. Property Panel Configuration128
- Figure B.39. External Hardware Devices - Preamps128
- External Control Support for FEMTO Preamps129
- Figure B.40. External Control Support for FEMTO Preamps129
- PMC100 (Piezo Motor Controller)130
- PPC200 Approach Interface Module130
- Figure B.41. PMC100130
- Z Scan Input Added to the Piezo Tube Item131
- External Hardware Item for AFM Cantilevers131
- Figure B.42. PPC200131
- Figure B.43. a -Z Scan Added to the Piezo Tube Item131
- Figure B.44. External Hardware Item for AFM Cantilevers131
- Microscopes132
- Figure B.45. Microscopes132
- Figure B.46. Piezo Sensitivity Selector132
- Figure B.47. Show/Hide Items from Hardware Composites133
Appendix C. Connecting the Microscope134
- RHK UHV300/700 - STM Beetle134
- Figure C.1. RHK STM Beetle - Connections Block Diagram134
- Figure C.2. R9 Connection Diagram for the RHK UHV300 Beetle STM134
- Figure C.3. Combined Bias and Preamp Cable135
- RHK UHV350/750 - AFM/STM Beetle136
- Figure C.4. RHK AFM/STM Beetle - Connections Block Diagram136
- RHK UHV900 - Pan STM137
- Figure C.5. RHK STM Pan - Connections Block Diagram137
- Figure C.6. Combined Bias and Preamp Cable138
Appendix D. R9 Connector Pinouts140
- R9 Preamp I/O 44-Pin Female Connector140
- Figure D.1. R9 Preamp I/O 44-Pin Female Connector140
- R9 DC Power Output 9-Pin Female Connector141
- Figure D.2. DC Power Output 9-Pin Female Connector141
- R9 Laser I/O 26-Pin Female Connector142
- Figure D.3. R9 Laser I/O 26-Pin Female Connector142
- R9 High Voltage Output 10-Pin Female Connector143
- Figure D.4. R9 High Voltage Output 10-Pin Female Connector143
- Figure D.5. R9 High Voltage Output Defaults for RHK Microscopes143
- R9 Rear Panel Bncs144
- Figure D.6. R9 Rear Panel Bncs144
- R9 Low Voltage Outputs 15-Pin Female Connector145
- Figure D.7. R9 Low Voltage Outputs 15-Pin Female Connector145
- R9 Digital I/O 25-Pin Female Connectors (2)146
- Figure D.8. R9 Digital I/O 25-Pin Connectors146
- R9 Preamp I/O Cable 44-Pin to 15-Pin147
- Figure D.9. R9 Preamp I/O Cable 44-Pin to 15-Pin147
Appendix E. Configuring the High Voltage Block148
- Figure E.1. Common Scan Head Designs148
- RHK UHV300/700 STM Beetle149
- RHK UHV350/750 AFM/STM Beetle149
- Figure E.2. RHK UHV300/700 High Voltage Block149
- Figure E.3. RHK UHV350/750 High Voltage Block149
- RHK UHV900 STM Pan150
- Figure E.4. RHK UHV900 High Voltage Block150
Appendix F. Approach151
- RHK STM Beetle - UHV300/700152
- Confirm Connections to Microscope152
- Figure F.1. the Approach Procedure Panel152
- Table F.1. Preconfigured Approach Systems152
- Check Approach and Feedback Settings153
- RHK AFM/STM Beetle - UHV350/750153
- Confirm Connections to Microscope153
- Figure F.2. STM Beetle Approach Procedure Panel153
- Beetle Single Step in154
- Figure F.3. AFM/STM Beetle Approach Procedure Panel154
- Beetle Single Step out155
- Beetle Fast in155
- Figure F.4. Beetle Single Step in Procedure155
- Beetle Fast out156
- Z Beetle Approach Slow156
- RHK Pan - UHV900156
- Confirm Connections to Microscope156
- Figure F.5. Beetle Slow Approach Procedure156
- Check Approach and Feedback Settings157
Appendix G. Feedback Modes158
- PI Controller Gain Values158
- Z PI Controller Linearization158
- STM Mode159
Appendix H. Helpful Hints160
Appendix I. Details on an IHL File's Construction161
- Scan Processor161
- Figure I.1. RHK UHV300 STM IHL161
- Figure I.2. Scan Processor Connection to High Voltage Block162
- Scan Heads163
- Preamplifiers163
- Input Channels163
- Lock-In Amplifiers163
- Z PI Loop164
- Each Feedback Mode Remembers Gain164
- Figure I.3. Setting Gain in Feedback Mode164
- Channel 1 Drive165
- Bias Setting165
- Z Offset165
- Ppc200165
- Measure Items165
- Scan Area Window166
- Ramp Spectroscopy Settings166
- Hardware Watchers166
- Figure I.4. Hardware Watcher in PLL166
- Fast Sweep Aborts167
- Fast Sweep Abort Setup167
- Figure I.5. Fast Sweep Abort167
- Figure I.6. Settings for Fast Sweep Abort167
- Yes/No' Message Box168
- Figure I.7. 'Yes/No' Message Box168
- Multiple R9 Controls in a State169
- Sweep Options in R9 Controls169
- Figure I.8. Play a Sound with Message Box Notification169
- Figure I.9. Simplified R9 Controls170
Appendix J. Details on Procedure Space Constructions171
- Constructing Procedures171
- Figure J.1. Creating a Procedure171
- Figure J.2. New Procedure Space172
- Connecting Components in Hardware Space and Procedure Space173
- Rearranging Connecting Lines173
- Figure J.3. Connecting Components in Hardware Space and Procedure Space173
- Deleting a Connecting Line174
- Figure J.4. Selecting a Wire174
- Figure J.5. Using the Arranging Pins174
- Example Procedure175
- Figure J.6. Deleting a Wire175
- Figure J.7. Pulse Tip Template175
- Figure J.8. Pulse Tip - Set First Activate to CH1 Drive175
- Figure J.9. Pulse Tip - CH1 Drive Properties176
- Figure J.10. Pulse Tip - Hiding CH1 Drive Properties177
- Figure J.11. Pulse Tip - Setting the CH1 Drive Pulse Rise178
- Figure J.12. Pulse Tip - Setting the Pulse Duration178
- Setting Parameters as Reference or Value179
- Figure J.13. Pulse Tip - Setting the CH1 Drive Pulse Fall179
- Figure J.14. Pulse Tip - Setting a Reference179
- Naming a Procedure180
- Validating the Procedure181
- Figure J.15. Pulse Tip - Setting a Name181
- Figure J.16. Validating a Procedure182
- Figure J.17. Results of Validation183
- Figure J.18. Real-Time Wiring Validation183
- Figure J.19. Validation Status Indicators184
- Figure J.20. Initialization Progress Bar184
- Running the Procedure185
- From Hardware Space185
- Figure J.21. Compile on Initialize185
- From a Procedure Panel186
- Stopping the Procedure186
- Figure J.22. Opening a Procedure from Hardware Space186
- Figure J.23. Running a Procedure from Hardware Space186
- Adding Loops to Procedures187
- Figure J.24. Tip Pulse - Original Procedure187
- Figure J.25. Tip Pulse - Adding a Loop187
- Figure J.26. Selecting Multiple Objects188
- Figure J.27. Cutting and Pasting Objects in Procedure Space189
- Figure J.28. Cutting and Pasting States and Loops Inside Procedure Space190
- Figure J.29. Setting the Loop Count190
- Accidental Deletion of a State or Loop191
- Adding Conditionals to Procedures191
- Figure J.30. Tip Pulses Inside a Loop191
- Figure J.31. Protection against Accidentally Delecting a State or Loop191
- A "Script Conditional" Item192
- Configuring Startup and Shutdown Procedures192
- Figure J.32. Conditional Inside Procedure Space192
- Figure J.33. Script Condition in Procedure Space192
- Figure J.34. Configure Post-Initialize and Pre-Shutdown Procedures193
Appendix K. Reference Guide194
- Scan Area Window194
- Main Panel194
- Figure K.1. Scan Area Window Main Panel194
- Figure K.2. Toggle Zoom195
- Figure K.3. Procedure Panels196
- Figure K.4. Configuring Procedure Panels197
- Figure K.5. Z Feedback Meter Set Range197
- Advanced Panel198
- Figure K.6. Z Feedback Bar198
- Figure K.7. Scan Area Window Advanced Panel198
- Save Panel200
- Figure K.8. Scan Area Window Save Panel200
- Figure K.9. SM4 File Names200
- Figure K.10. Parameters Changed During Image Acquisition201
- Save - Datasafe202
- Navigation Config202
- Figure K.11. Scan Area Window Datasafe Panel202
- Figure K.12. Scan Area Window Navigation Config. Panel203
- XY Graph Windows204
- XY Graph Toolbar204
- Select Curve204
- Figure K.13. XY Graph Window204
- Figure K.14. XY Graph Toolbar - Select Curve204
- Zoom205
- Figure K.15. XY Graph Toolbar - Zoom205
- Cursor Mode206
- Statistics207
- Autoscale207
- Figure K.16. XY Graph Toolbar - Cursor Mode207
- Figure K.17. Cursor Mode Statistics Dialog Box207
- Pan208
- Curve Groups208
- Figure K.18. XY Graph Toolbar - Autoscale208
- Figure K.19. XY Graph Toolbar - Pan208
- Figure K.20. XY Graph Toolbar - Curve Groups208
- Settings Tab209
- Curves Tab209
- Figure K.21. XY Graph Settings209
- Figure K.22. XY Graph Settings - Curves209
- Show210
- Preprocessing Modes210
- Figure K.23. XY Graph Settings - Panes210
- Figure K.24. XY Graph Settings - Preprocessing Modes210
- Display Modes211
- Curve Attributes211
- Figure K.25. XY Graph Settings - Display Modes211
- Figure K.26. XY Graph Settings - Curve Attributes211
- Layout Tab212
- Figure K.27. XY Graph Settings - Layout212
- Cursor Mode Tab213
- Context Menu213
- Figure K.28. XY Graph Layout Settings213
- Figure K.29. XY Graph Context Menu213
- Oscilloscope214
- Settings214
- Figure K.30. XY Graph Oscilloscope214
- Figure K.31. XY Graph Oscilloscope Settings214
- Spectrum Analyzer215
- Figure K.32. XY Graph Spectrum Analyzer215
- Settings216
- Common Usage216
- Figure K.33. Spectrum Analyzer Settings216
- Monitor217
- Table K.1. Types of Monitors217
- Controls218
- Figure K.34. Monitor Controls218
- Transient Recorder and Transient Recorder FFT219
- Figure K.35. Transient Recorder Output219
- Figure K.36. Transient Recorder FFT Output220
Appendix L. Power Supply Wiring222
- Figure L.1. Power Supply Terminal Wiring222
- Table L.1. R9 Input Fuses222
Appendix M. Graphically Configured Oscillators and Lock-In Amplifiers223
- Typical Example223
- Figure M.1. Typical Reference Setup in Hardware Space223
- Advanced Example224
- Figure M.2. Typical Reference Setup on the Dashboard224
- Figure M.3. Advanced Reference Setup in Hardware Space224
- Figure M.4. Advanced Reference Setup on the Dashboard225
Appendix N. Phase-Locked Loop (PLL)226
- PSD Alignment Window226
- Figure N.1. Phase-Locked Loop226
- Frequency Sweeps227
- Figure N.2. PSD Alignment Window227
- Coarse Sweep228
- Figure N.3. Frequency Sweep228
- Measure Peak229
- Set Frequency229
- Unwrap Phase229
- Figure N.4. Unwrap Phase Procedure in Frequency Sweep229
- Procedures230
Appendix O. Inventor SDK230

RHK Technology R9 - Slope Compensation Range; Internal Piezo Modulation; Figure B.26. Scan Processor; Figure B.27. Slope Compensation

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