RHK Technology R9 - B.10. Scan Processor

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Appendix A. IHDL Element Details

A.1. Overview of a Hardware Item

All the Hardware Items have a similar organization and operation. Open up the Channel 1 Bias Drive and

see exactly how it works and how to use it.

The Channel 1 Bias Drive Hardware item, its Properties Palette, its Dashboard and a simplification of the

Dashboard are shown in the figure below.

Figure A.1. Hardware Space Properties

Main Page

default chapter3
- Table of Contents3
- About this Quick Start Guide14
- Significant Changes in R9S 4.016
- Significant Changes in R9S 4.218
- Significant Changes in R9S 5.020
- Significant Changes in R9S 5.222
Chapter 1. Prepare Your SPM System27
- Check the Hardware for Damage27
- Configure the Power27
- Figure 1.1. Check the R9 for Damage27
- Connecting the Ethernet28
- Figure 1.2. Location of Power, Frequency, Voltage and Serial Number Information28
- Ethernet Connection29
- Using more than One Ethernet Communications Link29
- Start and Try the R9 Control System Software (R9S)29
- Figure 1.3. Ethernet Connection Diagram29
- Opening R9 Software (R9S)30
- Understand IHDL™ and the R9 Software Components30
- Figure 1.4. R9 Dashboard30
- Open a Preconfigured IHDL™ File31
- Figure 1.5. Opening a Preconfigured IHDL32
- Figure 1.6. Selecting the Workbench Tab32
- Figure 1.7. RHK UHV300 Preconfigured STM Hardware Workbench33
- Workbench User Interface Component Overview34
- Figure 1.8. UHV 300 STM Hardware Workbench Overview34
- Components of Interest35
- Figure 1.9. Hardware Space36
- Initial Testing of the R9 Controller37
- Figure 1.10. Save the IHDL with a New Name38
- Figure 1.11. Auto-Backup IHDL Files38
- Figure 1.12. Workbench - Testing UHV 300.Ihl39
- Initial Tests40
- Figure 1.13. R9S Testing Screen Using the Testing UHV 300 Ihl40
- Measuring Preamplifier Noise and Adjusting Input Circuit Parameters42
- Figure 1.14. Oscilloscope - Topography and Current42
- Figure 1.15. Testing the Input Offset43
- Figure 1.16. Spectrum Analyzer Result at Full Bandwidth44
- Adjusting Bias Voltage Parameters45
- Figure 1.17. Spectrum Analyzer Result with 2 Khz Filter with 48 Db Rolloff45
- Figure 1.18. Bias Voltage and CH1 Drive Settings46
- Figure 1.19. Bias Modulation through the Tunneling Gap Simulator47
- Further Testing48
Chapter 2. Connect Your Microscope49
Chapter 3. Approach50
- Approach Settings50
- Feedback Settings51
- Figure 3.1. Open the Approach Procedures Panel51
- Figure 3.2. Typical Dashboard for STM52
- Fast in53
- Slow Approach53
- Figure 3.3. Camera View of the Tip and Sample53
- Adjusting the Position with Single Steps54
- Operating Mode Switching55
- Figure 3.4. Z Feedback Bar55
- Figure 3.5. Mode Switching55
Chapter 4. Acquire an Image57
- Verify the Available Signals57
- Figure 4.1. Checking the Available Signals57
- Configure Scan Settings58
- Figure 4.2. Scan Area Window Main Panel58
- Table 4.1. Z Bar Zoom Ranges59
- Figure 4.3. Scan Area Window - Advanced, Save60
- Figure 4.4. Scan Area Window - Tip Standby Position60
- Multi-Height Imaging61
- Figure 4.5. Scan Area Window - Nav Config., Image Settings61
- Begin Image Acquisition62
- Figure 4.6. Multi-Height Imaging62
- Figure 4.7. Open an Image Window63
- Figure 4.8. Open an Image Line63
- Optimizing Feedback and Scanning Parameters64
- Drift Correction65
- Figure 4.9. Scan Area Window - Drift Settings65
- Figure 4.10. Automatic Drift Correction66
- Automatic Drift Correction67
- Manual Drift Correction67
- Image+Spectroscopy Mode67
- Points67
- Line68
- Figure 4.11. Image+Spectroscopy - Points68
- Figure 4.12. Image+Spectroscopy - Line68
- Region69
- Line Spectroscopy with Image Line Verification69
- Figure 4.13. Image+Spectroscopy - Region69
Chapter 5. Display and Analyze Your Image70
- Browser70
- Figure 5.1. File Explorer View70
- Basic Image Processing71
- Background Removal71
- Figure 5.2. Shadow Style Artifact from X Offset Subtract71
- Filtering72
- Displaying SPM Images72
- Image Manipulation72
- Figure 5.3. Image Manipulation72
- Display Image in 3D Format73
- Figure 5.4. Pre-Processing Data Mode and Color Map Mode73
- Export the SPM Image74
- Displaying Spectral Data on an Image74
- Figure 5.5. Interactive 3D74
- Figure 5.6. Image+Spectroscopy - Display Spectral Data75
- Locating SM4 Data Files76
- Figure 5.7. Locating SM4 Data Files76
Chapter 6. Acquire Spectroscopy Data77
- Configuring the I/V Ramp Spectroscopy Settings77
- Figure 6.1. Dashboard View of the IV Ramp Spectroscopy Settings78
- Figure 6.2. Spectroscopy - Alternate Scan Direction: Disabled79
- Figure 6.3. Spectroscopy - Alternate Scan Direction: Enabled79
- Starting an IV Spectroscopy Procedure80
- Figure 6.4. Graphical Representation of Ramp Spectroscopy Timings80
- Figure 6.5. Scan Area Window Access to Spectroscopy Procedures81
- DI/DV Spectroscopy Measurements82
- Figure 6.6. the Preconfigured UHV300 Ihl82
- Figure 6.7. Dashboard for Uhv300.Ihl83
- Figure 6.8. Example I/V Spectroscopy Measurement on a Pair of Back to Back Fets83
- Figure 6.9. Spectroscopy Settings and Circuit Diagram for the Trial DI/DV Spectroscopy84
- Figure 6.10. Modification to Pre-Configured UHV300 Dashboard84
- Background for DI/DV Measurement85
- Figure 6.11. the 'DI' Oscilloscope Trace for 2Mv Oscillation Amplitude Shown above and a Series Resistance of 200 Meg Ohms85
- Figure 6.12. I/V and DI/DV Spectroscopy Plots86
- Figure 6.13. Pictorial Representation of DI/DV87
- Figure 6.14. Interferometer Feedback88
Chapter 7. Analyze Spectroscopy Data89
- Analyzing Spectroscopy Data89
- Display and Analyze Your Spectroscopy Data89
- Exporting Your Spectroscopy Data90
- Figure 7.1. Spectroscopy90
- Figure 7.2. Two Different Kinds of File Export Format, Picture File and ASCII File91
Appendix A. IHDL Element Details92
- Overview of a Hardware Item92
- Figure A.1. Hardware Space Properties92
- Hiding Dashboard Panels to Ribbon93
- Figure A.2. Hiding Dashboard Controls93
- Overview of an R9 Control94
- Figure A.3. Hiding Dashboard Panels to Ribbon94
- Figure A.4. Showing Panels on the Ribbon94
- Figure A.5. R9 Controls95
- Figure A.6. Ramping R9 Controls95
- User-Configurable Max/Min Ranges on Data Entry96
- Figure A.7. User-Configurable Limits on Data Entry96
- Figure A.8. Settings for User-Configurable Limits96
- Adding Procedure Panel to Hardware Composites on the Dashboard97
- Configure Measure Items97
- Figure A.9. Adding Procedure Panels to Composites on the Dashboard97
- Figure A.10. Preconfigured STM Measure Items98
Appendix B. Hardware Space Components99
- Channel 1 Drive and Channel 2 Drive99
- Hardware Space99
- Figure B.1. Channel 1 Drive - Hardware Space99
- Block Diagram of Output Circuitry100
- Property Panel in Hardware Space100
- Figure B.2. Block Diagram of Drive 1 and Drive 2 Output Circuitry100
- Figure B.3. Channel 1 Drive - Property Panel in Hardware Space100
- Table B.1. Channel 1 Drive Output100
- Channel 1 Input and Channel 2 Input103
- Hardware Space103
- Figure B.4. Hardware Space - Channel 1 Input103
- Block Diagram of Input Circuitry104
- Property Panel in Hardware Space104
- Figure B.5. Block Diagram of Channel 1 and Channel 2 Input Circuitry104
- Figure B.6. Property Panel in Hardware Space104
- Channel 3 Input and Channel 4 Input106
- Hardware Space106
- Block Diagram of Input Circuitry106
- Figure B.7. Hardware Space - Channel 3 Input106
- Figure B.8. Block Diagram of Channel 3 and Channel 4 Input Circuitry106
- Property Panel in Hardware Space107
- Figure B.9. Property Panel in Hardware Space107
- CH5 Input108
- STM Bias108
- Figure B.10. CH5 Input in Hardware Space108
- Figure B.11. STM Bias108
- Lock-In Amplifiers109
- Hardware Space109
- Figure B.12. Lock-In Amplifier - Hardware Space109
- Using the Lock-In Amplifier as a Low Pass Filter110
- Figure B.13. Lock-In Amplifier - Low Pass Filter110
- Using the Lock-In Amplifier for DI/DV Measurements111
- Lock-In Amplifiers Operating Independent of the High Speed Inputs111
- Figure B.14. Lock-In Amplifier Used for DI/DV111
- Feedback Loops112
- Figure B.15. Lock-In Amplifier Operating Independent of the Inputs112
- Figure B.16. Feedback Loop Controllers113
- Figure B.17. Feedback Loop Connections113
- Auxiliary PI Feedback Controller115
- Figure B.18. Auxillary PI Feedback Controller115
- Figure B.19. aux PI Input in Hardware Space115
- Kelvin PI Feedback Controller116
- Figure B.20. aux PI Input Settings116
- Figure B.21. Kelvin PI Feedback Controller116
- Figure B.22. Kelvin PI Input in Hardware Space116
- Filters for High Speed Inputs117
- Transient Recorder117
- Figure B.23. Kelvin PI Input Settings117
- Figure B.24. Filters for High Speed Inputs117
- Scan Processor118
- Figure B.25. Transient Recorder118
- Slope Compensation Range119
- Internal Piezo Modulation119
- Figure B.26. Scan Processor119
- Figure B.27. Slope Compensation119
- Figure B.28. Internal Piezo Modulation120
- High Voltage Amplifiers121
- Figure B.29. Internal Piezo Modulation Output121
- Figure B.30. High Voltage Amplifiers121
- Figure B.31. High Voltage X Scan Signal Output Examples122
- Status Adcs124
- Pulse Counting124
- Figure B.32. Status A/D Inputs124
- Figure B.33. Pulse Counting124
- TTL Inputs and Outputs125
- Figure B.34. TTL Output125
- Forth Scripts126
- Description126
- Figure B.35. Forth Scripts126
- Figure B.36. Description126
- Measure Item127
- Figure B.37. Measure Item127
- Data Channels Have User-Configurable Names128
- External Hardware Devices128
- Preamps128
- Figure B.38. Property Panel Configuration128
- Figure B.39. External Hardware Devices - Preamps128
- External Control Support for FEMTO Preamps129
- Figure B.40. External Control Support for FEMTO Preamps129
- PMC100 (Piezo Motor Controller)130
- PPC200 Approach Interface Module130
- Figure B.41. PMC100130
- Z Scan Input Added to the Piezo Tube Item131
- External Hardware Item for AFM Cantilevers131
- Figure B.42. PPC200131
- Figure B.43. a -Z Scan Added to the Piezo Tube Item131
- Figure B.44. External Hardware Item for AFM Cantilevers131
- Microscopes132
- Figure B.45. Microscopes132
- Figure B.46. Piezo Sensitivity Selector132
- Figure B.47. Show/Hide Items from Hardware Composites133
Appendix C. Connecting the Microscope134
- RHK UHV300/700 - STM Beetle134
- Figure C.1. RHK STM Beetle - Connections Block Diagram134
- Figure C.2. R9 Connection Diagram for the RHK UHV300 Beetle STM134
- Figure C.3. Combined Bias and Preamp Cable135
- RHK UHV350/750 - AFM/STM Beetle136
- Figure C.4. RHK AFM/STM Beetle - Connections Block Diagram136
- RHK UHV900 - Pan STM137
- Figure C.5. RHK STM Pan - Connections Block Diagram137
- Figure C.6. Combined Bias and Preamp Cable138
Appendix D. R9 Connector Pinouts140
- R9 Preamp I/O 44-Pin Female Connector140
- Figure D.1. R9 Preamp I/O 44-Pin Female Connector140
- R9 DC Power Output 9-Pin Female Connector141
- Figure D.2. DC Power Output 9-Pin Female Connector141
- R9 Laser I/O 26-Pin Female Connector142
- Figure D.3. R9 Laser I/O 26-Pin Female Connector142
- R9 High Voltage Output 10-Pin Female Connector143
- Figure D.4. R9 High Voltage Output 10-Pin Female Connector143
- Figure D.5. R9 High Voltage Output Defaults for RHK Microscopes143
- R9 Rear Panel Bncs144
- Figure D.6. R9 Rear Panel Bncs144
- R9 Low Voltage Outputs 15-Pin Female Connector145
- Figure D.7. R9 Low Voltage Outputs 15-Pin Female Connector145
- R9 Digital I/O 25-Pin Female Connectors (2)146
- Figure D.8. R9 Digital I/O 25-Pin Connectors146
- R9 Preamp I/O Cable 44-Pin to 15-Pin147
- Figure D.9. R9 Preamp I/O Cable 44-Pin to 15-Pin147
Appendix E. Configuring the High Voltage Block148
- Figure E.1. Common Scan Head Designs148
- RHK UHV300/700 STM Beetle149
- RHK UHV350/750 AFM/STM Beetle149
- Figure E.2. RHK UHV300/700 High Voltage Block149
- Figure E.3. RHK UHV350/750 High Voltage Block149
- RHK UHV900 STM Pan150
- Figure E.4. RHK UHV900 High Voltage Block150
Appendix F. Approach151
- RHK STM Beetle - UHV300/700152
- Confirm Connections to Microscope152
- Figure F.1. the Approach Procedure Panel152
- Table F.1. Preconfigured Approach Systems152
- Check Approach and Feedback Settings153
- RHK AFM/STM Beetle - UHV350/750153
- Confirm Connections to Microscope153
- Figure F.2. STM Beetle Approach Procedure Panel153
- Beetle Single Step in154
- Figure F.3. AFM/STM Beetle Approach Procedure Panel154
- Beetle Single Step out155
- Beetle Fast in155
- Figure F.4. Beetle Single Step in Procedure155
- Beetle Fast out156
- Z Beetle Approach Slow156
- RHK Pan - UHV900156
- Confirm Connections to Microscope156
- Figure F.5. Beetle Slow Approach Procedure156
- Check Approach and Feedback Settings157
Appendix G. Feedback Modes158
- PI Controller Gain Values158
- Z PI Controller Linearization158
- STM Mode159
Appendix H. Helpful Hints160
Appendix I. Details on an IHL File's Construction161
- Scan Processor161
- Figure I.1. RHK UHV300 STM IHL161
- Figure I.2. Scan Processor Connection to High Voltage Block162
- Scan Heads163
- Preamplifiers163
- Input Channels163
- Lock-In Amplifiers163
- Z PI Loop164
- Each Feedback Mode Remembers Gain164
- Figure I.3. Setting Gain in Feedback Mode164
- Channel 1 Drive165
- Bias Setting165
- Z Offset165
- Ppc200165
- Measure Items165
- Scan Area Window166
- Ramp Spectroscopy Settings166
- Hardware Watchers166
- Figure I.4. Hardware Watcher in PLL166
- Fast Sweep Aborts167
- Fast Sweep Abort Setup167
- Figure I.5. Fast Sweep Abort167
- Figure I.6. Settings for Fast Sweep Abort167
- Yes/No' Message Box168
- Figure I.7. 'Yes/No' Message Box168
- Multiple R9 Controls in a State169
- Sweep Options in R9 Controls169
- Figure I.8. Play a Sound with Message Box Notification169
- Figure I.9. Simplified R9 Controls170
Appendix J. Details on Procedure Space Constructions171
- Constructing Procedures171
- Figure J.1. Creating a Procedure171
- Figure J.2. New Procedure Space172
- Connecting Components in Hardware Space and Procedure Space173
- Rearranging Connecting Lines173
- Figure J.3. Connecting Components in Hardware Space and Procedure Space173
- Deleting a Connecting Line174
- Figure J.4. Selecting a Wire174
- Figure J.5. Using the Arranging Pins174
- Example Procedure175
- Figure J.6. Deleting a Wire175
- Figure J.7. Pulse Tip Template175
- Figure J.8. Pulse Tip - Set First Activate to CH1 Drive175
- Figure J.9. Pulse Tip - CH1 Drive Properties176
- Figure J.10. Pulse Tip - Hiding CH1 Drive Properties177
- Figure J.11. Pulse Tip - Setting the CH1 Drive Pulse Rise178
- Figure J.12. Pulse Tip - Setting the Pulse Duration178
- Setting Parameters as Reference or Value179
- Figure J.13. Pulse Tip - Setting the CH1 Drive Pulse Fall179
- Figure J.14. Pulse Tip - Setting a Reference179
- Naming a Procedure180
- Validating the Procedure181
- Figure J.15. Pulse Tip - Setting a Name181
- Figure J.16. Validating a Procedure182
- Figure J.17. Results of Validation183
- Figure J.18. Real-Time Wiring Validation183
- Figure J.19. Validation Status Indicators184
- Figure J.20. Initialization Progress Bar184
- Running the Procedure185
- From Hardware Space185
- Figure J.21. Compile on Initialize185
- From a Procedure Panel186
- Stopping the Procedure186
- Figure J.22. Opening a Procedure from Hardware Space186
- Figure J.23. Running a Procedure from Hardware Space186
- Adding Loops to Procedures187
- Figure J.24. Tip Pulse - Original Procedure187
- Figure J.25. Tip Pulse - Adding a Loop187
- Figure J.26. Selecting Multiple Objects188
- Figure J.27. Cutting and Pasting Objects in Procedure Space189
- Figure J.28. Cutting and Pasting States and Loops Inside Procedure Space190
- Figure J.29. Setting the Loop Count190
- Accidental Deletion of a State or Loop191
- Adding Conditionals to Procedures191
- Figure J.30. Tip Pulses Inside a Loop191
- Figure J.31. Protection against Accidentally Delecting a State or Loop191
- A "Script Conditional" Item192
- Configuring Startup and Shutdown Procedures192
- Figure J.32. Conditional Inside Procedure Space192
- Figure J.33. Script Condition in Procedure Space192
- Figure J.34. Configure Post-Initialize and Pre-Shutdown Procedures193
Appendix K. Reference Guide194
- Scan Area Window194
- Main Panel194
- Figure K.1. Scan Area Window Main Panel194
- Figure K.2. Toggle Zoom195
- Figure K.3. Procedure Panels196
- Figure K.4. Configuring Procedure Panels197
- Figure K.5. Z Feedback Meter Set Range197
- Advanced Panel198
- Figure K.6. Z Feedback Bar198
- Figure K.7. Scan Area Window Advanced Panel198
- Save Panel200
- Figure K.8. Scan Area Window Save Panel200
- Figure K.9. SM4 File Names200
- Figure K.10. Parameters Changed During Image Acquisition201
- Save - Datasafe202
- Navigation Config202
- Figure K.11. Scan Area Window Datasafe Panel202
- Figure K.12. Scan Area Window Navigation Config. Panel203
- XY Graph Windows204
- XY Graph Toolbar204
- Select Curve204
- Figure K.13. XY Graph Window204
- Figure K.14. XY Graph Toolbar - Select Curve204
- Zoom205
- Figure K.15. XY Graph Toolbar - Zoom205
- Cursor Mode206
- Statistics207
- Autoscale207
- Figure K.16. XY Graph Toolbar - Cursor Mode207
- Figure K.17. Cursor Mode Statistics Dialog Box207
- Pan208
- Curve Groups208
- Figure K.18. XY Graph Toolbar - Autoscale208
- Figure K.19. XY Graph Toolbar - Pan208
- Figure K.20. XY Graph Toolbar - Curve Groups208
- Settings Tab209
- Curves Tab209
- Figure K.21. XY Graph Settings209
- Figure K.22. XY Graph Settings - Curves209
- Show210
- Preprocessing Modes210
- Figure K.23. XY Graph Settings - Panes210
- Figure K.24. XY Graph Settings - Preprocessing Modes210
- Display Modes211
- Curve Attributes211
- Figure K.25. XY Graph Settings - Display Modes211
- Figure K.26. XY Graph Settings - Curve Attributes211
- Layout Tab212
- Figure K.27. XY Graph Settings - Layout212
- Cursor Mode Tab213
- Context Menu213
- Figure K.28. XY Graph Layout Settings213
- Figure K.29. XY Graph Context Menu213
- Oscilloscope214
- Settings214
- Figure K.30. XY Graph Oscilloscope214
- Figure K.31. XY Graph Oscilloscope Settings214
- Spectrum Analyzer215
- Figure K.32. XY Graph Spectrum Analyzer215
- Settings216
- Common Usage216
- Figure K.33. Spectrum Analyzer Settings216
- Monitor217
- Table K.1. Types of Monitors217
- Controls218
- Figure K.34. Monitor Controls218
- Transient Recorder and Transient Recorder FFT219
- Figure K.35. Transient Recorder Output219
- Figure K.36. Transient Recorder FFT Output220
Appendix L. Power Supply Wiring222
- Figure L.1. Power Supply Terminal Wiring222
- Table L.1. R9 Input Fuses222
Appendix M. Graphically Configured Oscillators and Lock-In Amplifiers223
- Typical Example223
- Figure M.1. Typical Reference Setup in Hardware Space223
- Advanced Example224
- Figure M.2. Typical Reference Setup on the Dashboard224
- Figure M.3. Advanced Reference Setup in Hardware Space224
- Figure M.4. Advanced Reference Setup on the Dashboard225
Appendix N. Phase-Locked Loop (PLL)226
- PSD Alignment Window226
- Figure N.1. Phase-Locked Loop226
- Frequency Sweeps227
- Figure N.2. PSD Alignment Window227
- Coarse Sweep228
- Figure N.3. Frequency Sweep228
- Measure Peak229
- Set Frequency229
- Unwrap Phase229
- Figure N.4. Unwrap Phase Procedure in Frequency Sweep229
- Procedures230
Appendix O. Inventor SDK230

RHK Technology R9 - B.10. Scan Processor

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