STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 5-13
Strasbaugh Confidential
5-13
5.3.1.2 E10 State Relation to 7AF Equipment State
5.3.1.2.1 E10 Non-Productive/Non-Scheduled
The Equipment is not scheduled for use in production. This state is reflected primarily in the 7AF Standby state (VID 17 =
5). Other useful information would be host information regarding material or Equipment scheduling.
5.3.1.2.2 E10 Non-Productive/Unscheduled Downtime
The Equipment is scheduled for use in production, but is not available due to unforeseen events. Possible reasons for
transitions into this state include: 1) maintenance delay; 2) repair; 3) consumables replacement; 4) bad input (bad wafers).
This state is primarily reflected in the 7AF Fault states (VID 17 = 1,2) or Attention Request states (VID 17 = 3,4), but
may include other states if the host’s information determines that one of the previously mentioned conditions exist.
5.3.1.2.3 E10 Non-Productive/Scheduled Downtime
The Equipment is scheduled to be out of production so that maintenance can be performed. This state is primarily reflected
in the 7AF standby state (VID 17 = 5), but may include other states if the host’s information determines that the machine
is scheduled to be “checked out” to maintenance. Care must be taken that when the machine is run by maintenance for test
cases, the Productive state (VID 17 = 6) is not counted toward E10 Productive time.
5.3.1.2.4 E10 Non-Productive/Engineering
The Equipment may be running wafers (VID 17 = 6), but these are not intended to be used in normal production. This
state signifies that Engineering data is being gathered from the Equipment separate from an actual production run. The
host must use its information to be sure that the Productive state (VID 17 = 6) is not counted toward E10 Productive
time.
5.3.1.2.5 E10 Non-Productive/Standby
The Equipment is ready for production, but is awaiting resources. This state is reflected primarily in the 7AF
Unacknowledged Assistance Requested state (VID 17 = 3), but may be reflected in the 7AF Standby state (VID 17 = 5).
Other useful information would be host information regarding material or Equipment scheduling.
5.3.1.2.6 E10 Productive
The Equipment is actively processing wafers for use in production. This state is reflected in the 7AF Productive state (VID
17 = 6) and the host’s information that production product is being put into the Equipment.
5.3.2 7AF Process State Diagram
This diagram depicts the working states of the 7AF.
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