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STRASBAUGH, INC.
5-14 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
EXECUTING
MAIN SCREEN
MAINTENANCE
DRESS CYCLE
HOME
MACHINE
EDIT RECIPES
GRIND DATA
IDLE
INITIALIZE
WAIT FOR
START
GRIND
WAIT FOR QUIT
PAUSE
GRIND CYCLE
1
2
3
45
6
7
89
10
11
12 13
14 1516
17
18
Figure 4 7AF Equipment Process States

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