Operations and Maintenance Manual Operator Functions
Version 1.2 - June 2004 8 - 17
Pause
Cycle
Touch the Pause Cycle button to interrupt a grind cycle. Resume
the grind cycle by touching the Start Cycle button.
The Pause Cycle function may be used to suspend a cycle for
making adjustments when the real time status display values are
not within the range of requirements. (For the range of
requirements, refer to the Basic Operation section of this chapter
or see your process supervisor.) When adjustments have been
completed, the grind cycle may then be resumed.
Start
Cycle
Touch the Start Cycle button:
a. to begin the grinding process
or
b. resume a grind cycle after a Pause.
SHOW
RECIPE
Show Fine
HIDE
RECIPE
Touch the Show Recipe button to display the Show Recipe
submenu choices (coarse or fine).
Touch the Show Fine selection to display the fine grind
parameters of the selected recipe for verification.
Note: If the grind parameters require a change, refer to the
Machine Setup chapter of this manual or to your process
supervisor.
Touch the Hide Recipe button to hide the displayed grind
parameters.
Send 1, Send
2, Receive 1,
Receive 2
Cassette
Turrets
Touch the Cassette Turret icons to rotate the cassette turrets 180 °,
presenting the wafer cassettes either to the robot or to the operator.
Information Available at the Grind Cycle Menu
The Status Display Area
The real time status display, located at the right side of the Grind Cycle menu screen,
monitors machine component position and function values continuously while machine
power is on. The Grind Cycle status display is identical to that of the Home Machine
menu. For details, refer to Information Available at the Home Machine Menu, located
in the Menus Used in Basic Operation section of this chapter.
Note that negative numbers are always displayed in RED.
Error Messages
Fault (error) messages indicating errors that prevent cycle function are displayed when
appropriate. For detailed information on error messages refer to the Troubleshooting
chapter of this manual.
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