STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 8-7
Strasbaugh Confidential
8-7
53 EC U1 NU
CONFIGSPOOL: 0 = Disabled; 1 = Enabled;
54 EC BOOL NU
OVERWRITESPOOL:
Determines the action taken by the Equipment when
the Spool file reaches its capacity.
TRUE - Overwrite spool
FALSE - Do Not overwrite spool
(default = 0)
135 EC U1
CONFIGCONNECT: Controls which SECS message the Equipment will
use for a Connect Request.
0 = S1FF1
1 = S1F65
2 = S1F13
136 EC U4
MAXSPOOLTRANSMIT: Specifies the maximum number of spooled
messages the equipment will sends each time the Host reads the spool. A
setting of zero indicates that all spooled messages should be sent.
137 EC U4
MAXSPOOLFILESIZE: The maximum size the spool file will be allowed
to grow to (default = 100,000 bytes)
138 EC BOOL
PPFORMAT: The 7AF does not support formatted recipes. The only valid
value is 0.
Coarse (Left Wheel) Grind Data
The following data is not valid until the collection event, Coarse wafer
grind complete (CEID 21), occurs. Note: When Grind Mode is set to
“Left” (see VID 27) the following data refers to Left Wheel Data.
55 DV A[12]
COARSELOTID: Coarse Lot ID
56 DV A[12]
COARSERECIPEUSED: Coarse Recipe Used
57 DV F4
COARSESTEP0PROBEREADING: Coarse Step 0 Probe Reading
58 DV F4
COARSESTEP0WHEELPOSITION: Coarse Step 0 Wheel Position
59 DV I2
COARSESTEP0FORCE: Coarse Step 0 Force in LB.
60 DV F4
COARSESTEP0FEEDRATE: Coarse Step 0 Feed Rate
61 DV U2
COARSESTEP0TIMEFROMSTART: Coarse Step 0 Time from Start in
Seconds
62 DV F4
COARSESTEP1PROBEREADING: Coarse Step 1 Probe Reading
63 DV F4
COARSESTEP1WHEELPOSITION: Coarse Step 1 Wheel Position
64 DV I2
COARSESTEP1FORCE: Coarse Step 1 Force in LB.
65 DV F4
COARSESTEP1FEEDRATE: Coarse Step 1 Feed Rate
66 DV U2
COARSESTEP1TIMEFROMSTART: Coarse Step 1 Time from Start in
Seconds
67 DV F4
COARSESTEP2PROBEREADING: Coarse Step 2 Probe Reading
68 DV F4
COARSESTEP2WHEELPOSITION: Coarse Step 2 Wheel Position
69 DV I2
COARSESTEP2FORCE: Coarse Step 2 Force in LB.
70 DV F4
COARSESTEP2FEEDRATE: Coarse Step 2 Feed Rate
71 DV U2
COARSESTEP2TIMEFROMSTART: Coarse Step 2 Time from Start in
Seconds
72 DV F4
COARSESTEP3PROBEREADING: Coarse Step 31 Probe Reading
73 DV F4
COARSESTEP3WHEELPOSITION: Coarse Step 3 Wheel Position
74 DV I2
COARSESTEP3FORCE: Coarse Step 3 Force in LB.
75 DV F4
COARSESTEP3FEEDRATE: Coarse Step 3 Feed Rate
76 DV U2
COARSE STEP3TIMEFROMSTART: Coarse Step 3 Time from Start in
Seconds
77 DV F4
COARSEDWELLPROBEREADING: Coarse Dwell Probe Reading
78 DV F4
COARSEDWELLWHEELPOSITION: Coarse Dwell Wheel Position
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