Strasbaugh nTellect 7AF - Page 1554

STRASBAUGH, INC.
8-8 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
79 DV I2
COARSEDWELLFORCE: Coarse Dwell Force in LB.
80 DV F4
COARSEDWELLFEEDRATE: Coarse Dwell Feed Rate
81 DV U2
COARSEDWELLTIMEFROMSTART: Coarse Dwell Time from Start in
Seconds
82 DV F4
COARSELIFTPROBEREADING: Coarse Lift Probe Reading
83 DV F4
COARSELIFTWHEELPOSITION: Coarse Lift Wheel Position
84 DV I2
COARSELIFTFORCE: Coarse Lift Force in LB.
85 DV F4
COARSELIFTFEEDRATE: Coarse Lift Feed Rate
86 DV U2
COARSELIFTTIMEFROMSTART: Coarse Lift Time from Start in
Seconds
Fine (Right Wheel) Grind Data
The following data is not valid until the collection event, Fine wafer
grind complete (CEID 22), occurs. Note: When Grind Mode is set to
“Right” (see VID 27) the following data refers to Right Wheel Data.
87 DV A[12]
FINELOTID: Fine Lot ID
88 DV A[12]
FINERECIPEUSED: Fine Recipe Used
89 DV F4
FINESTEP0PROBEREADING: Fine Step 0 Probe Reading
90 DV F4
FINESTEP0WHEELPOSITION: Fine Step 0 Wheel Position
91 DV I2
FINESTEP0FORCE: Fine Step 0 Force in LB.
92 DV F4
FINESTEP0FEEDRATE: Fine Step 0 Feed Rate
93 DV U2
FINESTEP0TIMEFROMSTART: Fine Step 0 Time from Start in Seconds
94 DV F4
FINESTEP1PROBEREADING: Fine Step 1 Probe Reading
95 DV F4
FINESTEP1WHEELPOSITION: Fine Step 1 Wheel Position
96 DV I2
FINESTEP1FORCE: Fine Step 1 Force in LB.
97 DV F4
FINESTEP1FEEDRATE: Fine Step 1 Feed Rate
98 DV U2
FINESTEP1TIMEFROMSTART: Fine Step 1 Time from Start in Seconds
99 DV F4
FINESTEP2PROBEREADING: Fine Step 2 Probe Reading
100 DV F4
FINESTEP2WHEELPOSITION: Fine Step 2 Wheel Position
101 DV I2
FINESTEP2FORCE: Fine Step 2 Force in LB.
102 DV F4
FINESTEP2FEEDRATE: Fine Step 2 Feed Rate
103 DV U2
FINESTEP2TIMEFROMSTART: Fine Step 2 Time from Start in Seconds
104 DV F4
FINESTEP3PROBEREADING: Fine Step 3 Probe Reading
105 DV F4
FINESTEP3WHEELPOSITION: Fine Step 3 Wheel Position
106 DV I2
FINESTEP3FORCE: Fine Step 3 Force in LB.
107 DV F4
FINESTEP3FEEDRATE: Fine Step 3 Feed Rate
108 DV U2
FINESTEP3TIMEFROMSTART: Fine Step 3 Time from Start in Seconds
109 DV F4
FINEDWELLPROBEREADING:Fine Dwell Probe Reading
110 DV F4
FINEDWELLWHEELPOSITION: Fine Dwell Wheel Position Last Probe
reading, end of dwell)
111 DV I2
FINEDWELLFORCE: Fine Dwell Force in LB.
112 DV F4
FINEDWELLFEEDRATE: Fine Dwell Feed Rate
113 DV U2
FINEDWELLTIMEFROMSTART: Fine Dwell Time from Start in
Seconds
114 DV F4
FINELIFTPROBEREADING: Fine Lift Probe Reading(Probe retracted)
115 DV F4
FINELIFTWHEELPOSITION: Fine Lift Wheel Position