STRASBAUGH, INC.
7AF SECS/GEM Interface Ver. 1.9 February 19, 2002 8-9
Strasbaugh Confidential
8-9
116 DV I2
FINELIFTFORCE: Fine Lift Force in LB.
117 DV F4
FINELIFTFEEDRATE: Fine Lift Feed Rate
118 DV U2
FINELIFTTIMEFROMSTART: Fine Lift Time from Start in Seconds
Real Time Variables
The following variables can be monitored during grind operations for “real
time” data collection.
119 SV F4
COARSEFEEDRATE Coarse Feed Rate
120 SV F4
FINEFEEDRATE: Fine Feed Rate
121 SV F4
COARSEGRINDFORCE: Coarse Grind Force
122 SV F4
FINEGRINDFORCE: Fine Grind Force
123 SV F4
COARSEWHEELPOSITION: Coarse Wheel Position
124 SV F4
FINEWHEELPOSITION: Fine Wheel Position
125 SV F4
COARSEPROBEREADING: Coarse Probe Reading
126 SV F4
FINEPROBEREADING: Fine Probe Reading
127 SV F4
COARSE VACUUMREADING: Coarse Vacuum Reading
128 SV F4
FINEVACUUMREADING: Fine Vacuum Reading
129 SV F4
COARSECOOLANTFLOW: Coarse Coolant Flow
130 SV F4
FINECOOLANTFLOW: Fine Coolant Flow
131 SV F4
COARSEMOTORCURRENT:Coarse Motor Current
132 SV F4
FINEMOTORCURRENT: Fine Motor Current
133 DV F4
DIAGRT1: Diag RT 1
134 DV F4
DIAGRT2: Diag RT 2
139 SV F4
COARSEWHEELWEAR: Coarse Wheel Wear
140 SV F4
FINEWHEELWEAR: Fine Wheel Wear
141 EC U1
TIMEFORMAT The Equipment Constant which determines if STIME and
TIME are sent in 12-byte or 16-byte format.
142 EC U2
GemLimitsDelay
This Equipment Constant contains the length of the polling
interval (in seconds) at which the software will check for Limits Monitoring
boundary crossings. Valid values are 1 through 32000.
143 SV U1
PrealignerSourceCassette The source cassette for the wafer currently at the
Prealigner station.
144 SV U1
PrealignerSourceSlot The source slot for the wafer currently at the
Prealigner station.
145 SV U1
LeftChuckSourceCassette The source cassette for the wafer currently at the
Left Chuck station.
146 SV U1
LeftChuckSourceSlot The source slot for the wafer currently at the Left
Chuck station.
147 SV U1
RightChuckSourceCassette The source cassette for the wafer currently at
the Right Chuck station.
148 SV U1
RightChuckSourceSlot The source slot for the wafer currently at the Right
Chuck station.
149 SV U1
SpinStationSourceCassette The source cassette for the wafer currently at
the Spin station.
150 SV U1
SpinStationSourceSlot The source slot for the wafer currently at the Spin
station.
151 SV U1
ReceiveCassette1SourceCassette The source cassette for the last wafer
placed in the Receive Cassette 1.
152 SV U1
ReceiveCassette1SourceSlot
The source slot for the last wafer placed in the
Receive Cassette 1.
153 SV U1
ReceiveCassette2SourceCassette The source cassette for the last wafer
placed in the Receive Cassette 2.
To Next Page
