Strasbaugh nTellect 7AF - Page 1556

STRASBAUGH, INC.
8-10 February 19, 2002 7AF SECS/GEM Interface Ver. 1.9
Strasbaugh Confidential
154 SV U1
ReceiveCassette2SourceSlot
The source slot for the last wafer placed in the
Receive Cassette 2.
155 SV U1
SourceStationOfGet The source station of the latest “wafer get” operation
(associated with CE 77).
156 SV U1
DestinationStationOfPut The destination station of the latest “wafer put”
operation (associated with CE 77).
157 SV U1
CurrentGrindMode This variable specifies the current grind mode as
follows:
0 = Normal
1 = Dual Fine
2 = Dual Coarse
Spare Variables
157 -
234
SV U1
SPARE - reserved for future use
GEM Specific Variables
235 DV U4
ALARMSERIAL: Alarm Serial. The sequence number of the most recent
alarm change (going on or going off). This number starts at zero at power-up
and increments by one for each alarm transition which occurs.
236 DV U1
ABORTLEVEL: Abort Level
237 SV A[16]
CLOCK: The Equipment’s current Date and Time in the following format:
YYYYMMDDhhmmsscc.
YYYY = year
MM = month
DD = day
hh = hour
mm = minutes
ss = seconds
cc = centiseconds
238 DV U4
DATAID - The DATAID value used in the most recent SECS message using
DATAID.
239 DV A[0...9]
PPCHANGENAME - The PPID of the Process Program most recently
created, changed or deleted.
240 DV U1
PPCHANGESTATUS - The action (create, change,delete) taken on a
Process Program.
1 = Created
2 = Changed
3 = Deleted
241 DV U4
PREVIOUSCEID - The CEID of the most recent Collection Event which
has occurred.
242 DV U1
PREVIOUSCONTROLSTATE - The previous control state
243 SV A[12]
TIME – A string representation of the Equipment’s Date and Time. The
length of this string is dependent on the setting of VID 141, TIMEFORMAT.
If VID 141 = 0, the string is 12 bytes in length and uses the format
YYMMDDhhmmss. If VID 141 = 1, the string is 16 bytes in length and uses
the format YYYYMMDDhhmmsscc.
244 DV U4
ALARMID - The ALID of the most recent alarm transition.
245 SV U4 List
ALARMSENABLED - A list of all Alarms which are currently enabled. The
format is as follows:
<L
<U4 ALID>
. . .
>