Strasbaugh nTellect (Model 7AF) Wafer Grinder
8 - 48 Version 1.2 - June 2004
WHILE THE CYCLE IS RUNNING, MONITOR THE STATUS SCREEN DISPLAY VALUES
20. During the processing of the wafers, monitor the real time display and
compare with the following requirements:
a. Chuck vacuum during grinding must be greater than 18 inches of
mercury.
b. Motor current for the fine and coarse spindles must be less than 9.4 amps.
c. Left and right probe fluctuation must be less than 5 microns.
d. Coarse spindle force must not rise above 60 lbs. for more than 5 seconds.
e. Fine spindle force must not rise above 60 lbs. for more than 5 seconds.
f. Fine and coarse spindle force must fluctuate less than 10 lbs.
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