Operations and Maintenance Manual Operator Functions
Version 1.2 - June 2004 8 - 49
g. Spindle and work chuck speeds match recipe parameters.
If any of the above requirements is not met:
• If any of the above requirements is not met or if it appears that a wafer
may be broken or about to be broken, PAUSE or STOP the cycle by
following the procedures shown in If There’s a Problem, Pause or Stop
(Cancel) the Cycle, immediately below.
Correct the problem before continuing by referring to Normal
Operating Conditions and Strategies for Maintaining Them,
located in the Troubleshooting chapter of this manual.
If the status screen value requirements are met:
• Skip to When the Last Wafer Has Been Processed, below.
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