Operations and Maintenance Manual Operator Functions
Version 1.2 - June 2004 8 - 51
WHEN THE LAST WAFER HAS BEEN PROCESSED
22. When the last wafer has been processed, the Start Cycle and Stop Cycle
buttons begin flashing, signaling to the operator that the grind cycle has
been completed.
Turn off the flashing buttons:
Operator Action Explanation/Screen Display
• Stop Cycle Touch the "Stop Cycle" button to turn off the
flashing buttons, acknowledging to the control
computer that you recognize the cycle has been
completed.
23. Rotate each cassette turret away from the robot and remove its cassette:
• Repeat the procedures found in Steps 12. through 16., above in this
section, substituting "remove the cassette" for "placing the cassette".
Note: The cassettes cannot all face the operator at the same time.
24. To run another automatic grind cycle, return to the Main Menu and repeat
the procedures above.
To return to the Main Menu:
Operator Action Explanation/Screen Display
• QUIT Touch the "QUIT" button to return to the Main
Menu.
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