Strasbaugh nTellect 7AF - Page 190

Strasbaugh nTellect (Model 7AF) Wafer Grinder
8 - 58 Version 1.2 - June 2004
Figure 8-14 Example of a Coarse Wheel Truing Recipe
Step 1 Step 2 Dwell Lift
Coarse
Wheel
RPM
1875
Removal
190 10 75 revs. 20 µm
Feed rate
2 1 @ 2 µm/sec.
Chuck
Speed
150 150 150 150 RPM
Figure 8-15 Example of a Fine Wheel Truing Recipe
Step 1 Step 2 Dwell Lift
Fine
Wheel
RPM
4350
Removal
190 10 75 revs. 20 µm
Feed rate
2 1 @ 2 µm/sec.
Chuck
Speed
150 150 150 150 RPM
7. Compare the values of the process parameters shown in the recipe
displayed on the screen with those provided to you by the process
supervisor:
a. If the parameter values match, go on to Step 8., below.
b. If the parameter values do not match, contact your process supervisor.
8. Hide the recipe:
Operator Action Explanation/Screen Display
• HIDE RECIPE Touch the "HIDE RECIPE" button to hide the
recipe.