Strasbaugh nTellect (Model 7AF) Wafer Grinder
9 - 10 Version 1.2 - June 2004
Grind Steps and Parameters
WARNING! If the Wafer Diameter is not correct, the robot will crash into
the wafers.
Be sure to set the Wafer Diameter (located in the Wafer
Parameters box) to match the diameter of the wafers to be
ground.
The column titles, displayed across the top of both the coarse and fine grind
spreadsheets of the Wafer Recipes menu, reflect the five grind segments available for
each grind wheel (detailed in the Grinding Sequence section above).
The row titles, displayed on the Wafer Recipes menu between the coarse and fine
grind spreadsheets, list the grind parameters available to be set for the segments of the
grind process.
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